Inventor · disambiguated record
Rajesh S. Ramanujam
Also filed as: RAMANUJAM RAJESH · RAMANUJAM RAJESH S
6 granted patents·1 pending application·181 citations·filing 2004–2010
85Inventor score
Top patents by PatentIndex Score
7 records- 0196US8222574B2Temperature measurement and control of wafer support in thermal processing chamberSORABJI KHURSHED·Filed 2008·Granted Jul 17, 2012·62 cites·19 claims
- 0295US7860379B2Temperature measurement and control of wafer support in thermal processing chamberAPPLIED MATERIALS INC·Filed 2007·Granted Dec 28, 2010·27 cites·4 claims
- 0390US7112763B2Method and apparatus for low temperature pyrometry useful for thermally processing silicon wafersAPPLIED MATERIALS INC·Filed 2004·Granted Sep 26, 2006·69 cites·27 claims
- 0487US8254767B2Method and apparatus for extended temperature pyrometryHUNTER AARON M·Filed 2009·Granted Aug 28, 2012·19 cites·20 claims
- 0574US7804042B2Pryometer for laser annealing system compatible with amorphous carbon optical absorber layerAPPLIED MATERIALS INC·Filed 2007·Granted Sep 28, 2010·3 cites·10 claims
- 0667US8232503B2Pyrometer for laser annealing systemLI JIPING·Filed 2010·Granted Jul 31, 2012·1 cites·10 claims
- 0741US2011089166A1Temperature measurement and control of wafer support in thermal processing chamberHUNTER AARON MUIR·Filed 2010·Application pending·0 cites
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