Inventor · disambiguated record
Carl Woods
Also filed as: WOODS CARL · WOODS CARL A
40 granted patents·1 pending application·522 citations·filing 2002–2014
98Inventor score
Top patents by PatentIndex Score
41 records- 0198US6988327B2Methods and systems for processing a substrate using a dynamic liquid meniscusLAM RES CORP·Filed 2003·Granted Jan 24, 2006·164 cites·42 claims
- 0293US7198055B2Meniscus, vacuum, IPA vapor, drying manifoldLAM RES CORP·Filed 2002·Granted Apr 3, 2007·41 cites·20 claims
- 0392US7811424B1Reducing mechanical resonance and improved distribution of fluids in small volume processing of semiconductor materialsLAM RES CORP·Filed 2005·Granted Oct 12, 2010·11 cites·20 claims
- 0492US7350316B2Meniscus proximity system for cleaning semiconductor substrate surfacesLAM RES CORP·Filed 2007·Granted Apr 1, 2008·11 cites·14 claims
- 0592US7234477B2Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfacesLAM RES CORP·Filed 2002·Granted Jun 26, 2007·55 cites·30 claims
- 0692US7000622B2Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscusLAM RES CORP·Filed 2003·Granted Feb 21, 2006·50 cites·11 claims
- 0791US7069937B2Vertical proximity processorLAM RES CORP·Filed 2003·Granted Jul 4, 2006·49 cites·8 claims
- 0888US7127831B2Methods and systems for processing a substrate using a dynamic liquid meniscusLAM RES CORP·Filed 2005·Granted Oct 31, 2006·9 cites·27 claims
- 0985US7395611B2System processing a substrate using dynamic liquid meniscusLAM RES CORP·Filed 2006·Granted Jul 8, 2008·7 cites·20 claims
- 1082US7913703B1Method and apparatus for uniformly applying a multi-phase cleaning solution to a substrateLAM RES CORP·Filed 2006·Granted Mar 29, 2011·6 cites·14 claims
- 1181US7387689B2Methods for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfacesLAM RES CORP·Filed 2007·Granted Jun 17, 2008·6 cites·20 claims
- 1280US7389783B2Proximity meniscus manifoldLAM RES CORP·Filed 2004·Granted Jun 24, 2008·24 cites·10 claims
- 1379US7240679B2System for substrate processing with meniscus, vacuum, IPA vapor, drying manifoldLAM RES CORP·Filed 2002·Granted Jul 10, 2007·12 cites·7 claims
- 1477US7862693B2Apparatus for plating semiconductor wafersLAM RES CORP·Filed 2009·Granted Jan 4, 2011·4 cites·14 claims
- 1575US9117860B2Controlled ambient system for interface engineeringBOYD JOHN·Filed 2006·Granted Aug 25, 2015·5 cites·13 claims
- 1675US7722724B2Methods for substrate processing in cluster tool configurations having meniscus application systemsLAM RES CORP·Filed 2007·Granted May 25, 2010·2 cites·15 claims
- 1775US7383844B2Meniscus, vacuum, IPA vapor, drying manifoldLAM RES CORP·Filed 2006·Granted Jun 10, 2008·2 cites·14 claims
- 1873US7192488B2Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscusLAM RES CORP·Filed 2005·Granted Mar 20, 2007·3 cites·18 claims
- 1972US7464719B2Multi-menisci processing apparatusLAM RES CORP·Filed 2006·Granted Dec 16, 2008·3 cites·10 claims
- 2071US7828951B2Wafer support apparatus for electroplating process and method for using the sameLAM RES CORP·Filed 2009·Granted Nov 9, 2010·0 cites·15 claims
- 2170US7513262B2Substrate meniscus interface and methods for operationLAM RES CORP·Filed 2004·Granted Apr 7, 2009·12 cites·19 claims
- 2268US6702202B1Method and apparatus for fluid delivery to a backside of a substrateLAM RES CORP·Filed 2002·Granted Mar 9, 2004·9 cites·10 claims
- 2367US7811423B2Proximity processing using controlled batch volume with an integrated proximity headLAM RES CORP·Filed 2006·Granted Oct 12, 2010·2 cites·18 claims
- 2466US7350315B2Edge wheel dry manifoldLAM RES CORP·Filed 2003·Granted Apr 1, 2008·11 cites·21 claims
- 2563US7406972B2Substrate proximity processing structuresLAM RES CORP·Filed 2007·Granted Aug 5, 2008·1 cites·15 claims
- 2662US7731802B2Methods for transitioning a fluid meniscus to and from surfaces of a substrateLAM RES CORP·Filed 2009·Granted Jun 8, 2010·0 cites·10 claims
- 2760US6729339B1Method and apparatus for cooling a resonator of a megasonic transducerLAM RES CORP·Filed 2002·Granted May 4, 2004·13 cites·12 claims
- 2857US8726919B2Method and system for uniformly applying a multi-phase cleaning solution to a substrateLAM RES CORP·Filed 2013·Granted May 20, 2014·0 cites·17 claims
- 2957US2014202503A1Method and system for uniformly applying a multi-phase cleaning solution to a substrateLAM RES CORP·Filed 2014·Application pending·0 cites
- 3056US7566390B2Wafer support apparatus for electroplating process and method for using the sameLAM RES CORP·Filed 2004·Granted Jul 28, 2009·0 cites·16 claims
- 3156US7293571B2Substrate proximity processing housing and insert for generating a fluid meniscusLAM RES CORP·Filed 2004·Granted Nov 13, 2007·4 cites·10 claims
- 3255US6857435B2Method and apparatus for cooling a resonator of a megasonic transducerLAM RES CORP·Filed 2004·Granted Feb 22, 2005·1 cites·14 claims
- 3354US7128279B2Method and apparatus for fluid delivery to a backside of a substrateLAM RES CORP·Filed 2004·Granted Oct 31, 2006·3 cites·8 claims
- 3449US7452408B2System and method for producing bubble free liquids for nanometer scale semiconductor processingLAM RES CORP·Filed 2005·Granted Nov 18, 2008·0 cites·23 claims
- 3548US7780825B2Substrate gripper with integrated electrical contactsLAM RES CORP·Filed 2007·Granted Aug 24, 2010·0 cites·20 claims
- 3648US7645364B2Apparatus and method for plating semiconductor wafersLAM RES CORP·Filed 2004·Granted Jan 12, 2010·1 cites·6 claims
- 3747US8048283B2Method and apparatus for plating semiconductor wafersLAM RES CORP·Filed 2010·Granted Nov 1, 2011·0 cites·17 claims
- 3846US8567421B2Method and system for uniformly applying a multi-phase cleaning solution to a substrateFARBER JEFFREY J·Filed 2011·Granted Oct 29, 2013·0 cites·14 claims
- 3943US7704367B2Method and apparatus for plating semiconductor wafersLAM RES CORP·Filed 2004·Granted Apr 27, 2010·0 cites·23 claims
- 4041US8221608B2Proximity processing using controlled batch volume with an integrated proximity headWOODS CARL A·Filed 2010·Granted Jul 17, 2012·0 cites·7 claims
- 4140US8236382B2Proximity substrate preparation sequence, and method, apparatus, and system for implementing the sameRAVKIN MICHAEL·Filed 2004·Granted Aug 7, 2012·1 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →