Inventor · disambiguated record
Kaori Mashimo
Also filed as: MASHIMO KAORI
3 granted patents·1 pending application·4 citations·filing 2010–2014
56Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0165US9603195B2Substrate heat treatment apparatusCANON ANELVA CORP·Filed 2014·Granted Mar 21, 2017·2 cites·12 claims
- 0258US8691676B2Substrate heat treating apparatus, temperature control method of substrate heat treating apparatus, manufacturing method of semiconductor device, temperature control program of substrate heat treating apparatus, and recording mediumSHIBAGAKI MASAMI·Filed 2011·Granted Apr 8, 2014·1 cites·6 claims
- 0357US9431281B2Temperature control method for substrate heat treatment apparatus, semiconductor device manufacturing method, temperature control program for substrate heat treatment apparatus, and recording mediumSHIBAGAKI MASAMI·Filed 2010·Granted Aug 30, 2016·1 cites·4 claims
- 0434US2010243618A1Temperature control method for heating apparatusCANON ANELVA CORP·Filed 2010·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →