Assignee
SHIBAGAKI MASAMI
JP·6 granted patents·552 citations·filing 2009–2011
Top patents by PatentIndex Score
6 records- 0196US8147242B2Substrate supporting/transferring traySHIBAGAKI MASAMI·Filed 2009·Granted Apr 3, 2012·544 cites·7 claims
- 0273US8187958B2Substrate processing method and method of manufacturing crystalline silicon carbide (SIC) substrateSHIBAGAKI MASAMI·Filed 2011·Granted May 29, 2012·3 cites·12 claims
- 0369US8198182B2Annealing method for semiconductor device with silicon carbide substrate and semiconductor deviceSHIBAGAKI MASAMI·Filed 2011·Granted Jun 12, 2012·2 cites·6 claims
- 0458US8691676B2Substrate heat treating apparatus, temperature control method of substrate heat treating apparatus, manufacturing method of semiconductor device, temperature control program of substrate heat treating apparatus, and recording mediumSHIBAGAKI MASAMI·Filed 2011·Granted Apr 8, 2014·1 cites·6 claims
- 0557US9431281B2Temperature control method for substrate heat treatment apparatus, semiconductor device manufacturing method, temperature control program for substrate heat treatment apparatus, and recording mediumSHIBAGAKI MASAMI·Filed 2010·Granted Aug 30, 2016·1 cites·4 claims
- 0656US8090245B2Apparatus for heat-treating substrate and method for heat-treating substrateSHIBAGAKI MASAMI·Filed 2009·Granted Jan 3, 2012·1 cites·19 claims
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