Inventor · disambiguated record
Alexander S. Perel
Also filed as: PEREL ALEXANDER · PEREL ALEXANDER S · PEREL SR ALEXANDER S
35 granted patents·6 pending applications·376 citations·filing 1999–2024
97Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT12AXCELIS TECH INC9APPLIED MATERIALS INC8VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3CHANEY CRAIG R2
Top patents by PatentIndex Score
41 records- 0197US11127557B1Ion source with single-slot tubular cathodeAPPLIED MATERIALS INC·Filed 2020·Granted Sep 21, 2021·5 cites·20 claims
- 0296US7586109B2Technique for improving the performance and extending the lifetime of an ion source with gas dilutionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Sep 8, 2009·41 cites·21 claims
- 0394US6992311B1In-situ cleaning of beam defining apertures in an ion implanterAXCELIS TECH INC·Filed 2005·Granted Jan 31, 2006·41 cites·19 claims
- 0493US11251010B1Shaped repeller for an indirectly heated cathode ion sourceAPPLIED MATERIALS INC·Filed 2021·Granted Feb 15, 2022·4 cites·18 claims
- 0593US6288403B1Decaborane ionizerAXCELIS TECH INC·Filed 1999·Granted Sep 11, 2001·89 cites·10 claims
- 0690US7459704B2Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atomsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Dec 2, 2008·17 cites·36 claims
- 0789US8809800B2Ion source and a method for in-situ cleaning thereofKOO BON-WOONG·Filed 2009·Granted Aug 19, 2014·11 cites·16 claims
- 0888US9824846B2Dual material repellerVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Nov 21, 2017·5 cites·21 claims
- 0988US9142379B2Ion source and a method for in-situ cleaning thereofVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Sep 22, 2015·7 cites·11 claims
- 1087US6958481B2Decaborane ion sourceAXCELIS TECH INC·Filed 2001·Granted Oct 25, 2005·27 cites·10 claims
- 1186US10290461B1Ion source for enhanced ionizationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted May 14, 2019·3 cites·21 claims
- 1286US6479828B2Method and system for icosaborane implantationAXCELIS TECH INC·Filed 2000·Granted Nov 12, 2002·34 cites·10 claims
- 1384US10347457B1Dynamic temperature control of an ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jul 9, 2019·3 cites·20 claims
- 1484US8330127B2Flexible ion sourceLOW RUSSELL J·Filed 2008·Granted Dec 11, 2012·8 cites·17 claims
- 1582US10896799B1Ion source with multiple configurationsAPPLIED MATERIALS INC·Filed 2019·Granted Jan 19, 2021·3 cites·20 claims
- 1682US7999479B2Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 16, 2011·6 cites·17 claims
- 1780US7767986B2Method and apparatus for controlling beam current uniformity in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Aug 3, 2010·5 cites·19 claims
- 1880US7435977B2Ion beam angle measurement systems and methods for ion implantation systemsAXCELIS TECH INC·Filed 2005·Granted Oct 14, 2008·7 cites·23 claims
- 1979US8142607B2High density helicon plasma source for wide ribbon ion beam generationBILOIU COSTEL·Filed 2008·Granted Mar 27, 2012·7 cites·11 claims
- 2078US8003959B2Ion source cleaning end point detectionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 23, 2011·4 cites·11 claims
- 2178US7723697B2Techniques for optical ion beam metrologyVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted May 25, 2010·4 cites·17 claims
- 2278US7078712B2In-situ monitoring on an ion implanterAXCELIS TECH INC·Filed 2004·Granted Jul 18, 2006·23 cites·54 claims
- 2375USD1051838SSingle-slot tubular cathodeAPPLIED MATERIALS INC·Filed 2021·Granted Nov 19, 2024·0 cites·1 claims
- 2474US11631567B2Ion source with single-slot tubular cathodeAPPLIED MATERIALS INC·Filed 2021·Granted Apr 18, 2023·0 cites·18 claims
- 2574US8263944B2Directional gas injection for an ion source cathode assemblyKOO JOHN BON-WOONG·Filed 2008·Granted Sep 11, 2012·6 cites·16 claims
- 2674US7423277B2Ion beam monitoring in an ion implanter using an imaging deviceAXCELIS TECH INC·Filed 2006·Granted Sep 9, 2008·5 cites·27 claims
- 2768US8455839B2Cleaning of an extraction aperture of an ion sourceCHANEY CRAIG R·Filed 2010·Granted Jun 4, 2013·2 cites·14 claims
- 2868US8071956B2Cleaning of an extraction aperture of an ion sourceCHANEY CRAIG R·Filed 2010·Granted Dec 6, 2011·2 cites·19 claims
- 2965US11810746B2Variable thickness ion source extraction plateAPPLIED MATERIALS INC·Filed 2021·Granted Nov 7, 2023·0 cites·28 claims
- 3065US7598495B2Methods and systems for trapping ion beam particles and focusing an ion beamAXCELIS TECH INC·Filed 2007·Granted Oct 6, 2009·2 cites·33 claims
- 3164US8937003B2Technique for ion implanting a targetPEREL ALEXANDER S·Filed 2012·Granted Jan 20, 2015·2 cites·19 claims
- 3263US8003957B2Ethane implantation with a dilution gasVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 23, 2011·2 cites·20 claims
- 3357US10818469B2Cylindrical shaped arc chamber for indirectly heated cathode ion sourceAPPLIED MATERIALS INC·Filed 2018·Granted Oct 27, 2020·0 cites·18 claims
- 3457US2025379026A1Compact beam processing system having in-situ imaging metrologyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3544US7205556B2Bellows liner for an ion beam implanterAXCELIS TECH INC·Filed 2004·Granted Apr 17, 2007·1 cites·19 claims
- 3643US2007137576A1Technique for providing an inductively coupled radio frequency plasma flood gunVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Application pending·0 cites
- 3743US2007195482A1Johnsen-Rahbek electrostatic chuck driven with AC voltageVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Application pending·0 cites
- 3842US2007178678A1Methods of implanting ions and ion sources used for sameVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Application pending·0 cites
- 3939US2011143527A1Techniques for generating uniform ion beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Application pending·0 cites
- 4037US2003030010A1Decaborane vaporizer having improved vapor flowFiled 2001·Application pending·0 cites
- 4136US9076625B2Indirectly heated cathode cartridge designCHANEY CRAIG·Filed 2011·Granted Jul 7, 2015·0 cites·19 claims
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