Inventor · disambiguated record
Xinyu Fu
Also filed as: FU XINYU
51 granted patents·3 pending applications·820 citations·filing 1993–2021
98Inventor score
Files withAPPLIED MATERIALS INC35FU XINYU4ANTICANCER INC3ZHENG BO2ZOOMLION HEAVY INDUSTRY SCIENCE AND TECH CO LTD2
Top patents by PatentIndex Score
54 records- 0198US10121671B2Methods of depositing metal films using metal oxyhalide precursorsAPPLIED MATERIALS INC·Filed 2016·Granted Nov 6, 2018·429 cites·20 claims
- 0297US9685371B2Method of enabling seamless cobalt gap-fillAPPLIED MATERIALS INC·Filed 2014·Granted Jun 20, 2017·35 cites·13 claims
- 0397US7695567B2Water vapor passivation of a wall facing a plasmaAPPLIED MATERIALS INC·Filed 2006·Granted Apr 13, 2010·61 cites·15 claims
- 0496US9601339B2Methods for depositing fluorine/carbon-free conformal tungstenAPPLIED MATERIALS INC·Filed 2015·Granted Mar 21, 2017·13 cites·18 claims
- 0595US9330939B2Method of enabling seamless cobalt gap-fillZOPE BHUSHAN N·Filed 2013·Granted May 3, 2016·50 cites·18 claims
- 0695US9230815B2Methods for depositing fluorine/carbon-free conformal tungstenAPPLIED MATERIALS INC·Filed 2013·Granted Jan 5, 2016·17 cites·20 claims
- 0793US9082702B2Atomic layer deposition methods for metal gate electrodesAPPLIED MATERIALS INC·Filed 2013·Granted Jul 14, 2015·18 cites·8 claims
- 0891US8580354B2Plasma treatment of substrates prior to depositionFU XINYU·Filed 2011·Granted Nov 12, 2013·11 cites·5 claims
- 0991US8455352B1Method for removing native oxide and associated residue from a substrateZHENG BO·Filed 2012·Granted Jun 4, 2013·10 cites·20 claims
- 1091US7615489B1Method for forming metal interconnects and reducing metal seed layer overhangAPPLIED MATERIALS INC·Filed 2008·Granted Nov 10, 2009·17 cites·24 claims
- 1190US8524600B2Post deposition treatments for CVD cobalt filmsLEI YU·Filed 2011·Granted Sep 3, 2013·12 cites·20 claims
- 1290US7686926B2Multi-step process for forming a metal barrier in a sputter reactorAPPLIED MATERIALS INC·Filed 2005·Granted Mar 30, 2010·16 cites·11 claims
- 1389US8021514B2Remote plasma source for pre-treatment of substrates prior to depositionAPPLIED MATERIALS INC·Filed 2007·Granted Sep 20, 2011·10 cites·19 claims
- 1487US10043709B2Methods for thermally forming a selective cobalt layerAPPLIED MATERIALS INC·Filed 2015·Granted Aug 7, 2018·5 cites·19 claims
- 1587US8951913B2Method for removing native oxide and associated residue from a substrateAPPLIED MATERIALS INC·Filed 2014·Granted Feb 10, 2015·5 cites·13 claims
- 1687US8765601B2Post deposition treatments for CVD cobalt filmsAPPLIED MATERIALS INC·Filed 2013·Granted Jul 1, 2014·6 cites·20 claims
- 1786US9145612B2Deposition of N-metal films comprising aluminum alloysAPPLIED MATERIALS INC·Filed 2013·Granted Sep 29, 2015·3 cites·18 claims
- 1885US9230835B2Integrated platform for fabricating n-type metal oxide semiconductor (NMOS) devicesAPPLIED MATERIALS INC·Filed 2014·Granted Jan 5, 2016·6 cites·20 claims
- 1985US8772162B2Method for removing native oxide and associated residue from a substrateZHENG BO·Filed 2013·Granted Jul 8, 2014·5 cites·25 claims
- 2085US7704887B2Remote plasma pre-clean with low hydrogen pressureAPPLIED MATERIALS INC·Filed 2006·Granted Apr 27, 2010·10 cites·15 claims
- 2183US7658802B2Apparatus and a method for cleaning a dielectric filmAPPLIED MATERIALS INC·Filed 2005·Granted Feb 9, 2010·8 cites·15 claims
- 2282US9842769B2Method of enabling seamless cobalt gap-fillAPPLIED MATERIALS INC·Filed 2016·Granted Dec 12, 2017·3 cites·20 claims
- 2380US10199230B2Methods for selective deposition of metal silicides via atomic layer deposition cyclesAPPLIED MATERIALS INC·Filed 2015·Granted Feb 5, 2019·3 cites·19 claims
- 2480US8871064B2Electromagnet array in a sputter reactorGUNG TZA-JING·Filed 2010·Granted Oct 28, 2014·6 cites·6 claims
- 2580US7618521B2Split magnet ring on a magnetron sputter chamberAPPLIED MATERIALS INC·Filed 2005·Granted Nov 17, 2009·5 cites·21 claims
- 2679US8987080B2Methods for manufacturing metal gatesAPPLIED MATERIALS INC·Filed 2013·Granted Mar 24, 2015·4 cites·20 claims
- 2778US9834840B2Process kit shield for improved particle reductionRASHEED MUHAMMAD·Filed 2011·Granted Dec 5, 2017·1 cites·12 claims
- 2877US7618893B2Methods of forming a layer for barrier applications in an interconnect structureAPPLIED MATERIALS INC·Filed 2008·Granted Nov 17, 2009·6 cites·12 claims
- 2976US11887855B2Methods for depositing fluorine/carbon-free conformal tungstenAPPLIED MATERIALS INC·Filed 2021·Granted Jan 30, 2024·0 cites·19 claims
- 3076US9947578B2Methods for forming low-resistance contacts through integrated process flow systemsAPPLIED MATERIALS INC·Filed 2016·Granted Apr 17, 2018·2 cites·19 claims
- 3172US9595466B2Methods for etching via atomic layer deposition (ALD) cyclesAPPLIED MATERIALS INC·Filed 2015·Granted Mar 14, 2017·2 cites·19 claims
- 3271US8349724B2Method for improving electromigration lifetime of copper interconnection by extended post annealAPPLIED MATERIALS INC·Filed 2009·Granted Jan 8, 2013·4 cites·23 claims
- 3370US8586479B2Methods for forming a contact metal layer in semiconductor devicesFU XINYU·Filed 2012·Granted Nov 19, 2013·2 cites·21 claims
- 3468US7807568B2Methods for reducing damage to substrate layers in deposition processesAPPLIED MATERIALS INC·Filed 2008·Granted Oct 5, 2010·2 cites·23 claims
- 3564US5491284ANude mouse model for neoplastic diseaseANTICANCER INC·Filed 1993·Granted Feb 13, 1996·20 cites·21 claims
- 3661US8927423B2Methods for annealing a contact metal layer to form a metal silicidation layerAPPLIED MATERIALS INC·Filed 2012·Granted Jan 6, 2015·1 cites·18 claims
- 3760US10985023B2Methods for depositing fluorine/carbon-free conformal tungstenAPPLIED MATERIALS INC·Filed 2017·Granted Apr 20, 2021·0 cites·14 claims
- 3860US10483116B2Methods of depositing metal films using metal oxyhalide precursorsAPPLIED MATERIALS INC·Filed 2018·Granted Nov 19, 2019·0 cites·17 claims
- 3960US8852674B2Method for segregating the alloying elements and reducing the residue resistivity of copper alloy layersFU XINYU·Filed 2010·Granted Oct 7, 2014·1 cites·18 claims
- 4058US10718049B2Process kit shield for improved particle reductionAPPLIED MATERIALS INC·Filed 2017·Granted Jul 21, 2020·0 cites·20 claims
- 4156US10269633B2Method of enabling seamless cobalt gap-fillAPPLIED MATERIALS INC·Filed 2017·Granted Apr 23, 2019·0 cites·19 claims
- 4253US8168543B2Methods of forming a layer for barrier applications in an interconnect structureFU XINYU·Filed 2009·Granted May 1, 2012·0 cites·10 claims
- 4351US11970869B2Pump truck boom control method, pump truck boom control system and pump truckZOOMLION HEAVY INDUSTRY SCIENCE AND TECH CO LTD·Filed 2019·Granted Apr 30, 2024·0 cites·9 claims
- 4451US5569812ANude mouse model for human neoplastic diseaseANTICANCER INC·Filed 1995·Granted Oct 29, 1996·7 cites·12 claims
- 4549US10699946B2Method of enabling seamless cobalt gap-fillAPPLIED MATERIALS INC·Filed 2016·Granted Jun 30, 2020·0 cites·20 claims
- 4648US9922872B2Tungsten films by organometallic or silane pre-treatment of substrateAPPLIED MATERIALS INC·Filed 2016·Granted Mar 20, 2018·0 cites·18 claims
- 4747US2010099251A1Method for nitridation pretreatmentAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 4845US2008190760A1Resputtered copper seed layerAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 4944USRE39337ENude mouse model for human neoplastic diseaseANTICANCER INC·Filed 1998·Granted Oct 10, 2006·4 cites·50 claims
- 5042US8993434B2Methods for forming layers on a substrateYU JICK M·Filed 2011·Granted Mar 31, 2015·0 cites·19 claims
Showing the top 50 of 54 patent records by PatentIndex Score.
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