Inventor · disambiguated record
Onur N. Demirer
Also filed as: DEMIRER ONUR N · DEMIRER ONUR NIHAT · Demirer Onur
6 granted patents·10 citations·filing 2016–2020
73Inventor score
Top patents by PatentIndex Score
6 records- 0183US10754260B2Method and system for process control with flexible samplingKLA TENCOR CORP·Filed 2016·Granted Aug 25, 2020·3 cites·30 claims
- 0278US10444639B2Layer-to-layer feedforward overlay control with alignment correctionsKLA TENCOR CORP·Filed 2017·Granted Oct 15, 2019·4 cites·39 claims
- 0367US10340165B2Systems and methods for automated multi-zone detection and modelingKLA TENCOR CORP·Filed 2017·Granted Jul 2, 2019·2 cites·34 claims
- 0461US10692227B2Determination of sampling maps for alignment measurements based on reduction of out of specification pointsKLA TENCOR CORP·Filed 2017·Granted Jun 23, 2020·1 cites·20 claims
- 0550US11221561B2System and method for wafer-by-wafer overlay feedforward and lot-to-lot feedback controlKLA CORP·Filed 2020·Granted Jan 11, 2022·0 cites·19 claims
- 0633US10691028B2Overlay variance stabilization methods and systemsKLA TENCOR CORP·Filed 2016·Granted Jun 23, 2020·0 cites·16 claims
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