Inventor · disambiguated record
Eckhard Langer
Also filed as: LANGER ECKHARD
10 granted patents·1 pending application·36 citations·filing 2002–2011
85Inventor score
Top patents by PatentIndex Score
11 records- 0186US8329577B2Method of forming an alloy in an interconnect structure to increase electromigration resistanceLEHR MATTHIAS·Filed 2011·Granted Dec 11, 2012·8 cites·9 claims
- 0280US7335880B2Technique for CD measurement on the basis of area fraction determinationADVANCED MICRO DEVICES INC·Filed 2005·Granted Feb 26, 2008·8 cites·11 claims
- 0374US7611991B2Technique for increasing adhesion of metallization layers by providing dummy viasADVANCED MICRO DEVICES INC·Filed 2006·Granted Nov 3, 2009·8 cites·8 claims
- 0469US7311008B2Semiconductor structure comprising a stress sensitive element and method of measuring a stress in a semiconductor structureADVANCED MICRO DEVICES INC·Filed 2005·Granted Dec 25, 2007·3 cites·17 claims
- 0565US6953755B2Technique for monitoring the state of metal lines in microstructuresADVANCED MICRO DEVICES INC·Filed 2003·Granted Oct 11, 2005·6 cites·47 claims
- 0650US8118932B2Technique for monitoring dynamic processes in metal lines of microstructuresBUSCHBECK JOERG·Filed 2006·Granted Feb 21, 2012·2 cites·16 claims
- 0749US2009197408A1Increasing electromigration resistance in an interconnect structure of a semiconductor device by forming an alloyLEHR MATTHIAS·Filed 2008·Application pending·0 cites
- 0847US8058731B2Technique for forming metal lines in a semiconductor by adapting the temperature dependence of the line resistanceMEYER MORITZ ANDREAS·Filed 2007·Granted Nov 15, 2011·0 cites·13 claims
- 0946US8575029B2Technique for forming metal lines in a semiconductor by adapting the temperature dependence of the line resistanceMEYER MORITZ ANDREAS·Filed 2011·Granted Nov 5, 2013·0 cites·20 claims
- 1043US8058081B2Method of testing an integrity of a material layer in a semiconductor structureMEYER MORITZ ANDREAS·Filed 2007·Granted Nov 15, 2011·0 cites·18 claims
- 1142US6716650B2Interface void monitoring in a damascene processADVANCED MICRO DEVICES INC·Filed 2002·Granted Apr 6, 2004·1 cites·22 claims
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