Inventor · disambiguated record
Toshihiko Miyajima
Also filed as: MIYAJIMA TOSHIHIKO
42 granted patents·13 pending applications·1,016 citations·filing 1991–2019
98Inventor score
Top patents by PatentIndex Score
55 records- 0194US8522836B2Substrate storage pod with replacement function of clean gasOKABE TSUTOMU·Filed 2011·Granted Sep 3, 2013·18 cites·8 claims
- 0294US5364219AApparatus for clean transfer of objectsTDK CORP·Filed 1992·Granted Nov 15, 1994·216 cites·11 claims
- 0392US8186927B2Contained object transfer systemOKABE TSUTOMU·Filed 2009·Granted May 29, 2012·20 cites·6 claims
- 0492US7523769B2Enclosed container lid opening/closing system and enclosed container lid opening/closing methodTDK CORP·Filed 2005·Granted Apr 28, 2009·22 cites·6 claims
- 0591US8978718B2Purge device and load port apparatus including the sameEMOTO JUN·Filed 2012·Granted Mar 17, 2015·16 cites·9 claims
- 0690US9536765B2Load port unit and EFEM systemTDK CORP·Filed 2014·Granted Jan 3, 2017·13 cites·7 claims
- 0789US9153468B2Load port apparatusEMOTO JUN·Filed 2012·Granted Oct 6, 2015·12 cites·6 claims
- 0888US8061738B2Gas replacement systemOKABE TSUTOMU·Filed 2009·Granted Nov 22, 2011·12 cites·1 claims
- 0988US5139459AClean transfer method and system thereforTDK CORP·Filed 1991·Granted Aug 18, 1992·120 cites·17 claims
- 1086US7654291B2Purging apparatus and purging methodTDK CORP·Filed 2004·Granted Feb 2, 2010·35 cites·15 claims
- 1186US6199604B1Clean box, clean transfer method and apparatus thereforTDK CORP·Filed 1999·Granted Mar 13, 2001·81 cites·3 claims
- 1285US7379174B2Wafer detecting deviceTDK CORP·Filed 2005·Granted May 27, 2008·11 cites·5 claims
- 1385US6796763B2Clean box, clean transfer method and systemTDK CORP·Filed 2003·Granted Sep 28, 2004·29 cites·10 claims
- 1485US6390145B1Container and method for sealing the containerTDK CORP·Filed 2000·Granted May 21, 2002·34 cites·6 claims
- 1583US6984839B2Wafer processing apparatus capable of mapping wafersTDK CORP·Filed 2002·Granted Jan 10, 2006·25 cites·20 claims
- 1682US7927058B2Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load portTDK CORP·Filed 2007·Granted Apr 19, 2011·9 cites·9 claims
- 1781US7360346B2Purging system and purging method for the interior of a portable type hermetically sealed containerTDK CORP·Filed 2004·Granted Apr 22, 2008·30 cites·4 claims
- 1880US9543177B2Pod and purge system using the sameTDK CORP·Filed 2015·Granted Jan 10, 2017·3 cites·7 claims
- 1978US6641349B1Clean box, clean transfer method and systemTDK CORP·Filed 1999·Granted Nov 4, 2003·44 cites·20 claims
- 2078US6430802B1Clean box, clean transfer method and apparatus thereforTDK CORP·Filed 1999·Granted Aug 13, 2002·52 cites·7 claims
- 2177US8876173B2Substrate storage pod and lid opening/closing system for the sameIGARASHI HIROSHI·Filed 2011·Granted Nov 4, 2014·4 cites·11 claims
- 2277US6883770B1Load port mounting mechanismTDK CORP·Filed 2000·Granted Apr 26, 2005·20 cites·17 claims
- 2377US5730573AClean transfer method and apparatus thereforTDK CORP·Filed 1995·Granted Mar 24, 1998·48 cites·16 claims
- 2476US11199528B2Sensor built-in filter structure and wafer accommodation containerTDK CORP·Filed 2019·Granted Dec 14, 2021·2 cites·15 claims
- 2576US8251636B2Lid closing method for closed container and lid opening/closing system for closed containerSASAKI MUTSUO·Filed 2009·Granted Aug 28, 2012·6 cites·8 claims
- 2674US10276415B2Gas purge unitTDK CORP·Filed 2016·Granted Apr 30, 2019·2 cites·1 claims
- 2771US6136168AClean transfer method and apparatus thereforTDK CORP·Filed 1998·Granted Oct 24, 2000·41 cites·20 claims
- 2869US8562273B2Load port apparatusIGARASHI HIROSHI·Filed 2011·Granted Oct 22, 2013·2 cites·8 claims
- 2968US7621714B2Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unitTDK CORP·Filed 2004·Granted Nov 24, 2009·11 cites·1 claims
- 3067US8657346B2Lid opening/closing system for closed containerOKABE TSUTOMU·Filed 2009·Granted Feb 25, 2014·2 cites·14 claims
- 3167US8322759B2Closed container and lid opening/closing system thereforOKABE TSUTOMU·Filed 2009·Granted Dec 4, 2012·4 cites·9 claims
- 3267US7674083B2Clean device with clean box-opening/closing deviceTDK CORP·Filed 2004·Granted Mar 9, 2010·12 cites·6 claims
- 3364US7360985B2Wafer processing apparatus including clean box stopping mechanismTDK CORP·Filed 2002·Granted Apr 22, 2008·8 cites·2 claims
- 3462US8083456B2Contained object transfer systemOKABE TSUTOMU·Filed 2008·Granted Dec 27, 2011·1 cites·7 claims
- 3560US6168364B1Vacuum clean box, clean transfer method and apparatus thereforTDK CORP·Filed 1999·Granted Jan 2, 2001·23 cites·5 claims
- 3658US6561894B1Clean box, clean transfer method and apparatus thereforTDK CORP·Filed 1999·Granted May 13, 2003·21 cites·14 claims
- 3755US2007210533A1Interface sealTDK CORP·Filed 2007·Application pending·0 cites
- 3854US7748942B2Dust resistant load port apparatus and mini-environment systemTDK CORP·Filed 2007·Granted Jul 6, 2010·0 cites·6 claims
- 3949US8528947B2Closed container and lid opening/closing system thereforIGARASHI HIROSHI·Filed 2009·Granted Sep 10, 2013·0 cites·17 claims
- 4049US2009142166A1Container lid opening/closing system and substrate processing method using the systemTDK CORP·Filed 2008·Application pending·0 cites
- 4149US2009294442A1Lid opening/closing system for closed container, contained object insertion/takeout system having same lid opening/closing system, and substrate processing method using same lid opening/closing systemTDK CORP·Filed 2009·Application pending·0 cites
- 4249US2009142164A1Container lid opening/closing system and substrate processing method using the systemTDK CORP·Filed 2008·Application pending·0 cites
- 4348US11521879B2Load port apparatus, semiconductor manufacturing apparatus, and method of controlling atmosphere in podTDK CORP·Filed 2019·Granted Dec 6, 2022·0 cites·2 claims
- 4448US8029227B2Dust resistant load port apparatus and mini-environment systemTDK CORP·Filed 2010·Granted Oct 4, 2011·0 cites·10 claims
- 4547US2009035098A1Lid opening/closing system for closed container and substrate processing method using sameTDK CORP·Filed 2007·Application pending·0 cites
- 4647US2009245981A1Closed container, lid opening and closing system for closed container, wafer transfer system, and lid closing method for closed containerTDK CORP·Filed 2009·Application pending·0 cites
- 4745US2015311100A1Load port unit and efem systemTDK CORP·Filed 2014·Application pending·0 cites
- 4843US2014157722A1Lid opening/closing system for closed container, and substrate processing method using the sameTDK CORP·Filed 2013·Application pending·0 cites
- 4943US2004099826A1Wafer processing apparatus capable of mapping wafersTDK CORP·Filed 2003·Application pending·0 cites
- 5043US2004127048A1Wafer processing apparatus including clean box stopping mechanismTDK CORP·Filed 2003·Application pending·0 cites
Showing the top 50 of 55 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →