Inventor · disambiguated record
Ken-Ichiro Shinoda
Also filed as: SHINODA KEN · SHINODA KEN-ICHIRO
18 granted patents·4 pending applications·96 citations·filing 2001–2025
91Inventor score
Top patents by PatentIndex Score
22 records- 0190US12226936B2Substrate processing apparatus, substrate processing method, and article manufacturing methodCANON KK·Filed 2022·Granted Feb 18, 2025·1 cites·9 claims
- 0290US6674514B2Illumination optical system in exposure apparatusCANON KK·Filed 2001·Granted Jan 6, 2004·43 cites·19 claims
- 0382US10761316B2Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing articleCANON KK·Filed 2017·Granted Sep 1, 2020·2 cites·13 claims
- 0482US7955765B2Adjustment method, exposure method, device manufacturing method, and exposure apparatusCANON KK·Filed 2008·Granted Jun 7, 2011·6 cites·9 claims
- 0582US6560044B2Illumination optical system in exposure apparatusCANON KK·Filed 2001·Granted May 6, 2003·23 cites·14 claims
- 0680US7209218B2Exposure apparatus and method for manufacturing device using the exposure apparatusCANON KK·Filed 2006·Granted Apr 24, 2007·7 cites·9 claims
- 0778US7242457B2Exposure apparatus and exposure method, and device manufacturing method using the sameCANON KK·Filed 2005·Granted Jul 10, 2007·5 cites·9 claims
- 0878US2024342965A1Substrate processing apparatus, substrate processing method, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 0977US7385672B2Exposure apparatus and methodCANON KK·Filed 2005·Granted Jun 10, 2008·5 cites·8 claims
- 1073US9465308B2Imprint apparatus, imprint method and method of manufacturing an articleCANON KK·Filed 2014·Granted Oct 11, 2016·2 cites·12 claims
- 1169US9541825B2Imprint apparatus and article manufacturing methodCANON KK·Filed 2013·Granted Jan 10, 2017·1 cites·10 claims
- 1266US9616613B2Imprint apparatus including alignment and overlay measurementCANON KK·Filed 2013·Granted Apr 11, 2017·1 cites·16 claims
- 1361US9910351B2Imprint apparatus and article manufacturing methodCANON KK·Filed 2016·Granted Mar 6, 2018·0 cites·10 claims
- 1456US11480872B2Imprint apparatus, imprint method, and method for manufacturing articleCANON KK·Filed 2020·Granted Oct 25, 2022·0 cites·9 claims
- 1554US2025196038A1Method to form a dust collecting layer on a porous body without using a binderNITTETSU MINING CO LTD·Filed 2025·Application pending·0 cites
- 1649US2022001354A1Coating solutionNITTETSU MINING CO LTD·Filed 2019·Application pending·0 cites
- 1748US9625837B2Imprint apparatus and method of manufacturing articleCANON KK·Filed 2014·Granted Apr 18, 2017·0 cites·15 claims
- 1847US11709421B2Imprint apparatusCANON KK·Filed 2020·Granted Jul 25, 2023·0 cites·14 claims
- 1945US10386737B2Imprint apparatus and method for producing articleCANON KK·Filed 2016·Granted Aug 20, 2019·0 cites·17 claims
- 2044US10859912B2Imprint apparatus, imprint method, and article manufacturing methodCANON KK·Filed 2018·Granted Dec 8, 2020·0 cites·15 claims
- 2139US2018004091A1Mold, imprinting method, imprint apparatus, and method for manufacturing a semiconductor articleCANON KK·Filed 2017·Application pending·0 cites
- 2238US8208126B2Exposure apparatus and device fabrication methodSHINODA KEN-ICHIRO·Filed 2008·Granted Jun 26, 2012·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →