Inventor · disambiguated record
Shoji Hotta
Also filed as: HOTTA SHOJI
15 granted patents·2 pending applications·160 citations·filing 2000–2015
93Inventor score
Top patents by PatentIndex Score
17 records- 0194US9659744B2Charged particle beam apparatus and inspection method using the sameHITACHI HIGH TECH CORP·Filed 2015·Granted May 23, 2017·7 cites·13 claims
- 0290US6340632B1Method of manufacturing a semiconductor deviceHITACHI LTD·Filed 2000·Granted Jan 22, 2002·44 cites·37 claims
- 0388US8148682B2Method and apparatus for pattern position and overlay measurementHOTTA SHOJI·Filed 2009·Granted Apr 3, 2012·19 cites·20 claims
- 0483US6555464B2Semiconductor device and method of manufacturing the sameHITACHI LTD·Filed 2002·Granted Apr 29, 2003·25 cites·21 claims
- 0581US7884325B2Electron beam measurement apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Feb 8, 2011·6 cites·12 claims
- 0674US6939649B2Fabrication method of semiconductor integrated circuit device and maskRENESAS TECH CORP·Filed 2002·Granted Sep 6, 2005·17 cites·48 claims
- 0771US6656646B2Fabrication method of semiconductor integrated circuit deviceHITACHI LTD·Filed 2002·Granted Dec 2, 2003·14 cites·18 claims
- 0869US7387867B2Manufacturing method of semiconductor integrated circuit deviceHITACHI LTD·Filed 2004·Granted Jun 17, 2008·12 cites·18 claims
- 0968US7419916B2Manufacturing method of semiconductor deviceRENESAS TECH CORP·Filed 2006·Granted Sep 2, 2008·2 cites·8 claims
- 1067US10002743B2Measurement system and measurement methodHITACHI HIGH TECH CORP·Filed 2015·Granted Jun 19, 2018·1 cites·20 claims
- 1165US6528400B2Method of manufacturing a semiconductor deviceHITACHI LTD·Filed 2001·Granted Mar 4, 2003·8 cites·18 claims
- 1255US6774020B2Semiconductor device and method of manufacturing the sameRENESAS TECH CORP·Filed 2003·Granted Aug 10, 2004·4 cites·21 claims
- 1351US7943903B2Defect inspection method and its systemHITACHI HIGH TECH CORP·Filed 2009·Granted May 17, 2011·0 cites·15 claims
- 1449US2008000561A1Cast aluminum alloy excellent in relaxation resistance property and method of heat-treating the sameTOYOTA CHUO KENKYUSHO KK·Filed 2007·Application pending·0 cites
- 1549US2008006149A1CompressorKATO TAKAYUKI·Filed 2007·Application pending·0 cites
- 1648US8575547B2Electron beam measurement apparatusSOHDA YASUNARI·Filed 2010·Granted Nov 5, 2013·0 cites·2 claims
- 1748US7109127B2Manufacturing method of semiconductor deviceRENESAS TECH CORP·Filed 2004·Granted Sep 19, 2006·1 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →