Inventor · disambiguated record
Daan Daniel Johannes Antonius Van Sommeren
Also filed as: VAN SOMMEREN DAAN DANIEL JOHANNES ANTONIUS
10 granted patents·11 citations·filing 2015–2021
81Inventor score
Files withASML NETHERLANDS BV10
Top patents by PatentIndex Score
10 records- 0186US9798253B2Support table for a lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Oct 24, 2017·6 cites·20 claims
- 0277US10895808B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2016·Granted Jan 19, 2021·2 cites·19 claims
- 0375US10216100B2Inspection substrate and an inspection methodASML NETHERLANDS BV·Filed 2016·Granted Feb 26, 2019·2 cites·7 claims
- 0469US10948825B2Method for removing photosensitive material on a substrateASML NETHERLANDS BV·Filed 2016·Granted Mar 16, 2021·1 cites·20 claims
- 0566US11579533B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2021·Granted Feb 14, 2023·0 cites·20 claims
- 0660US10571810B2Substrate table, a lithographic apparatus and a method of operating a lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Feb 25, 2020·0 cites·20 claims
- 0756US10725390B2Inspection substrate and an inspection methodASML NETHERLANDS BV·Filed 2019·Granted Jul 28, 2020·0 cites·17 claims
- 0853US10317804B2Substrate table, lithographic apparatus and method of operating a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jun 11, 2019·0 cites·20 claims
- 0936US11762304B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 19, 2023·0 cites·22 claims
- 1024US10120290B2Fluid handling structure, immersion lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Nov 6, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →