Inventor · disambiguated record
Bert Dirk Scholten
Also filed as: SCHOLTEN BERT DIRK
10 granted patents·4 pending applications·5 citations·filing 2015–2023
80Inventor score
Top patents by PatentIndex Score
14 records- 0177US10895808B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2016·Granted Jan 19, 2021·2 cites·19 claims
- 0272US11664264B2Lithographic apparatus, method for unloading a substrate and method for loading a substrateASML NETHERLANDS BV·Filed 2016·Granted May 30, 2023·2 cites·24 claims
- 0371US12287586B2Stage system, lithographic apparatus, method for positioning and device manufacturing methodASML NETHERLANDS BV·Filed 2023·Granted Apr 29, 2025·0 cites·20 claims
- 0468US11269259B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Mar 8, 2022·0 cites·19 claims
- 0566US11579533B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2021·Granted Feb 14, 2023·0 cites·20 claims
- 0665US11860552B2Stage system, lithographic apparatus, method for positioning and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jan 2, 2024·1 cites·23 claims
- 0764US10871715B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Dec 22, 2020·0 cites·20 claims
- 0864US2023260820A1Lithographic apparatus, method for unloading a substrate and method for loading a substrateASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0956US10534270B2Lithography apparatus, a method of manufacturing a device and a control programASML NETHERLANDS BV·Filed 2019·Granted Jan 14, 2020·0 cites·20 claims
- 1051US11016401B2Substrates and methods of using those substratesASML HOLDING NV·Filed 2018·Granted May 25, 2021·0 cites·21 claims
- 1146US10261422B2Lithography apparatus and method of manufacturing a deviceASML NETHERLANDS BV·Filed 2015·Granted Apr 16, 2019·0 cites·20 claims
- 1238US2021053177A1System, device and method for reconditioning a substrate supportASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 1338US2021263418A1Tool for modifying a support surfaceASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 1437US2020103770A1A system for cleaning a substrate support, a method of removing matter from a substrate support, and a lithographic apparatusASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →