Inventor · disambiguated record
Carlo Cornelis Maria Luijten
Also filed as: LUIJTEN CARLO CORNELIS MARIA
14 granted patents·2 pending applications·43 citations·filing 2003–2020
89Inventor score
Top patents by PatentIndex Score
16 records- 0185US7808614B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Oct 5, 2010·6 cites·19 claims
- 0284US9606445B2Lithographic apparatus and method of manufacturing a deviceASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·5 cites·21 claims
- 0378US6842247B1Reticle independent reticle stage calibrationASML NETHERLANDS BV·Filed 2003·Granted Jan 11, 2005·17 cites·19 claims
- 0477US10649342B2Method and apparatus for determining a fingerprint of a performance parameterASML NETHERLANDS BV·Filed 2017·Granted May 12, 2020·2 cites·20 claims
- 0577US10571812B2Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Feb 25, 2020·2 cites·15 claims
- 0674US9625835B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2012·Granted Apr 18, 2017·2 cites·14 claims
- 0771US9494879B2Contamination trap for a lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Nov 15, 2016·3 cites·13 claims
- 0862US11194258B2Method and apparatus for determining a fingerprint of a performance parameterASML NETHERLANDS BV·Filed 2020·Granted Dec 7, 2021·0 cites·20 claims
- 0956US7522261B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 21, 2009·3 cites·29 claims
- 1054US9823590B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Nov 21, 2017·0 cites·20 claims
- 1153US7130019B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 31, 2006·3 cites·27 claims
- 1250US2008137049A1Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicleASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 1349US10001710B2Inspection apparatus, inspection method, lithographic apparatus and manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jun 19, 2018·0 cites·20 claims
- 1447US8427629B2Lithographic apparatus and device manufacturing methodLUIJTEN CARLO CORNELIS MARIA·Filed 2010·Granted Apr 23, 2013·0 cites·20 claims
- 1545US11054754B2Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 6, 2021·0 cites·17 claims
- 1643US2015331338A1Substrate Support for a Lithographic Apparatus and Lithographic ApparatusASML NETHERLANDS BV·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →