Inventor · disambiguated record
Marcus Gerhardus Hendrikus Meijerink
Also filed as: MEIJERINK MARCUS GERHARDUS HENDRIKUS
6 granted patents·37 citations·filing 2006–2013
78Inventor score
Top patents by PatentIndex Score
6 records- 0190US8382301B2Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contaminationZEISS CARL SMT GMBH·Filed 2009·Granted Feb 26, 2013·18 cites·34 claims
- 0287US8585224B2Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contaminationZEISS CARL SMT GMBH·Filed 2013·Granted Nov 19, 2013·11 cites·34 claims
- 0381US7671347B2Cleaning method, apparatus and cleaning systemASML NETHERLANDS BV·Filed 2006·Granted Mar 2, 2010·6 cites·25 claims
- 0467US7714986B2Laser beam conditioning system comprising multiple optical paths allowing for dose controlASML NETHERLANDS BV·Filed 2007·Granted May 11, 2010·2 cites·15 claims
- 0552US7826037B2Radiation beam pulse trimmingASML NETHERLANDS BV·Filed 2007·Granted Nov 2, 2010·0 cites·23 claims
- 0643US8717535B2SLM calibrationVISSER HUIBERT·Filed 2008·Granted May 6, 2014·0 cites·44 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →