Inventor · disambiguated record
Erwin John Van Zwet
Also filed as: VAN ZWET ERWIN · VAN ZWET ERWIN JOHN
21 granted patents·7 pending applications·63 citations·filing 2003–2024
91Inventor score
Files withTNO10ASML NETHERLANDS BV8VAN ZWET ERWIN JOHN5DE GRAAF ARIËL1DE JAGER PIETER WILLEM HERMAN1
Top patents by PatentIndex Score
28 records- 0197US9335638B2Lithographic apparatus, programmable patterning device and lithographic methodASML NETHERLANDS BV·Filed 2013·Granted May 10, 2016·19 cites·24 claims
- 0294US8531648B2Lithographic apparatus, programmable patterning device and lithographic methodDE JAGER PIETER WILLEM HERMAN·Filed 2009·Granted Sep 10, 2013·25 cites·34 claims
- 0377US11343001B2Photon exchange based quantum network and method of operating such a networkTNO·Filed 2019·Granted May 24, 2022·4 cites·15 claims
- 0476US10928736B2Method and apparatus for direct write maskless lithographyASML NETHERLANDS BV·Filed 2016·Granted Feb 23, 2021·2 cites·20 claims
- 0566US9416449B2Continuous patterned layer depositionDE GRAAF ARIËL·Filed 2011·Granted Aug 16, 2016·1 cites·20 claims
- 0666US9134630B2Lithographic apparatus and device manufacturing methodVAN ZWET ERWIN JOHN·Filed 2011·Granted Sep 15, 2015·1 cites·20 claims
- 0764US10114289B2Exposure head, exposure apparatus and method of operating an exposure headTNO·Filed 2015·Granted Oct 30, 2018·1 cites·20 claims
- 0863US9316926B2Lithographic apparatus and device manufacturing methodVAN ZWET ERWIN JOHN·Filed 2011·Granted Apr 19, 2016·1 cites·18 claims
- 0963US2024160110A1Systems and methods for distributing light deliveryASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1063US2024329548A1Systems and methods for thermally stable mounting of optical columnsASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1160US11953835B2Methods and systems for maskless lithographyASML NETHERLANDS BV·Filed 2020·Granted Apr 9, 2024·0 cites·20 claims
- 1260US7245357B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 17, 2007·8 cites·20 claims
- 1356US10224685B2Multi-beam laser systemTNO·Filed 2016·Granted Mar 5, 2019·1 cites·19 claims
- 1453US2010215222A1Method And System For Removing Undesired Plant PartsTNO·Filed 2008·Application pending·0 cites
- 1552US9372412B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 21, 2016·0 cites·20 claims
- 1647US2011233175A1Pick-and-place machineTNO·Filed 2009·Application pending·0 cites
- 1743US9715183B2Device, lithographic apparatus, method for guiding radiation and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Jul 25, 2017·0 cites·20 claims
- 1843US8717535B2SLM calibrationVISSER HUIBERT·Filed 2008·Granted May 6, 2014·0 cites·44 claims
- 1942US9235140B2Lithographic apparatus and device manufacturing methodVAN ZWET ERWIN JOHN·Filed 2011·Granted Jan 12, 2016·0 cites·20 claims
- 2042US9041911B2Lithographic apparatus and device manufacturing methodONVLEE JOHANNES·Filed 2011·Granted May 26, 2015·0 cites·20 claims
- 2139US10761315B2High power adaptive mirrorTNO·Filed 2016·Granted Sep 1, 2020·0 cites·9 claims
- 2239US10014165B2Radiation sensor device for high energy photonsTNO·Filed 2015·Granted Jul 3, 2018·0 cites·16 claims
- 2338US10712674B2Method of determining an overlay error, manufacturing method and system for manufacturing of a multilayer semiconductor device, and semiconductor device manufactured therebyTNO·Filed 2016·Granted Jul 14, 2020·0 cites·16 claims
- 2438US2020340953A1Subsurface inspection method and systemTNO·Filed 2018·Application pending·0 cites
- 2535US9482963B2Method of controlling a patterning device in a lithographic apparatus, device manufacturing method and lithographic apparatusMULCKHUYSE WOUTER FRANS WILLEM·Filed 2011·Granted Nov 1, 2016·0 cites·20 claims
- 2635US2012320359A1Lithographic apparatus and device manufacturing methodVAN ZWET ERWIN JOHN·Filed 2011·Application pending·0 cites
- 2733US2021072151A1Optical detection method and system for detecting a spatial feature on a surface of a substrateTNO·Filed 2017·Application pending·0 cites
- 2832US8925186B2System and method for picking and placement of chip diesVAN ZWET ERWIN JOHN·Filed 2011·Granted Jan 6, 2015·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →