Inventor · disambiguated record
Jason Augustino
Also filed as: AUGUSTINO JASON
16 granted patents·1 pending application·130 citations·filing 2006–2018
92Inventor score
Top patents by PatentIndex Score
17 records- 0196US7854820B2Upper electrode backing member with particle reducing featuresLAM RES CORP·Filed 2006·Granted Dec 21, 2010·38 cites·7 claims
- 0288US9412555B2Lower electrode assembly of plasma processing chamberAUGUSTINO JASON·Filed 2009·Granted Aug 9, 2016·17 cites·12 claims
- 0387US7942973B2Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatusesLAM RES CORP·Filed 2006·Granted May 17, 2011·9 cites·12 claims
- 0486US8702866B2Showerhead electrode assembly with gas flow modification for extended electrode lifeAUGUSTINO JASON·Filed 2006·Granted Apr 22, 2014·10 cites·19 claims
- 0585US7767028B2Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatusesLAM RES CORP·Filed 2008·Granted Aug 3, 2010·20 cites·20 claims
- 0684US8492736B2Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substratesWANG YEN-KUN VICTOR·Filed 2010·Granted Jul 23, 2013·10 cites·9 claims
- 0783US8171877B2Backside mounted electrode carriers and assemblies incorporating the sameAUGUSTINO JASON·Filed 2008·Granted May 8, 2012·8 cites·20 claims
- 0881US8215321B2Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatusesSHIH HONG·Filed 2011·Granted Jul 10, 2012·3 cites·18 claims
- 0972US8276604B2Peripherally engaging electrode carriers and assemblies incorporating the sameAUGUSTINO JASON·Filed 2008·Granted Oct 2, 2012·4 cites·16 claims
- 1071US8709202B2Upper electrode backing member with particle reducing featuresDE LA LLERA ANTHONY·Filed 2010·Granted Apr 29, 2014·2 cites·11 claims
- 1169US8603292B2Quartz window for a degas chamberAUGUSTINO JASON·Filed 2009·Granted Dec 10, 2013·3 cites·9 claims
- 1267US10153136B2Hollow RF feed with coaxial DC power feedLAM RES CORP·Filed 2015·Granted Dec 11, 2018·1 cites·12 claims
- 1367US9484243B2Processing chamber with features from side wallLAM RES CORP·Filed 2014·Granted Nov 1, 2016·2 cites·16 claims
- 1464US8221552B2Cleaning of bonded silicon electrodesOUTKA DUANE·Filed 2007·Granted Jul 17, 2012·3 cites·20 claims
- 1553US9093483B2Showerhead electrode assembly with gas flow modification for extended electrode lifeLAM RES CORP·Filed 2014·Granted Jul 28, 2015·0 cites·17 claims
- 1644US10812033B2High-power radio-frequency spiral-coil filterLAM RES CORP·Filed 2018·Granted Oct 20, 2020·0 cites·24 claims
- 1743US2015155187A1Annular baffle for pumping from above a plane of the semiconductor wafer supportLAM RES CORP·Filed 2013·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →