Inventor · disambiguated record
Hendrikus Tilmans
Also filed as: TILMANS HENDRIKUS · TILMANS HENDRIKUS A C
14 granted patents·9 pending applications·947 citations·filing 1990–2019
94Inventor score
Top patents by PatentIndex Score
23 records- 0197US6876056B2Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modulesIMEC INTER UNI MICRO ELECTR·Filed 2002·Granted Apr 5, 2005·239 cites·4 claims
- 0296US5165289AResonant mechanical sensorJOHNSON SERVICE CO·Filed 1990·Granted Nov 24, 1992·111 cites·15 claims
- 0394US7835157B2System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modulesIMEC·Filed 2007·Granted Nov 16, 2010·28 cites·19 claims
- 0494US6297072B1Method of fabrication of a microstructure having an internal cavityINTERUNIVERSITAIR MICRO ELKTRO·Filed 1999·Granted Oct 2, 2001·422 cites·42 claims
- 0588US7368311B2Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modulesIMEC INTER UNI MICRO ELECTR·Filed 2004·Granted May 6, 2008·38 cites·5 claims
- 0686US7002439B2Switchable capacitor and method of making the sameIMEC INTER UNI MICRO ELECTR·Filed 2003·Granted Feb 21, 2006·47 cites·19 claims
- 0785US9594128B2Two axes MEMS resonant magnetometerIMEC·Filed 2014·Granted Mar 14, 2017·8 cites·6 claims
- 0885US8610224B2MEMS element and electrical device using the sameNAITO YASUYUKI·Filed 2012·Granted Dec 17, 2013·9 cites·8 claims
- 0985US7372346B2Acoustic resonatorIMEC INTER UNI MICRO ELECTR·Filed 2004·Granted May 13, 2008·30 cites·20 claims
- 1078US7586393B2Reconfigurable cavity resonator with movable micro-electromechanical elements as tuning elementsIMEC INTER UNI MICRO ELECTR·Filed 2007·Granted Sep 8, 2009·8 cites·27 claims
- 1171US7439117B2Method for designing a micro electromechanical device with reduced self-actuationIMEC INTER UNI MICRO ELECTR·Filed 2005·Granted Oct 21, 2008·6 cites·18 claims
- 1258US8847087B2MEMS switch and communication device using the sameNAITO YASUYUKI·Filed 2010·Granted Sep 30, 2014·1 cites·21 claims
- 1347US2011010136A1Micro Electromechanical Device With Stress and Stress Gradient CompensationIMEC·Filed 2010·Application pending·0 cites
- 1445US2007069605A1Micro electromechanical device with stress and stress gradient compensationIMEC INTER UNI MICRO ELECTR·Filed 2006·Application pending·0 cites
- 1542US8003537B2Method for the production of planar structuresIMEC·Filed 2007·Granted Aug 23, 2011·0 cites·36 claims
- 1641US2012132529A1Method for precisely controlled masked anodizationZEKRY JOSEPH·Filed 2011·Application pending·0 cites
- 1739US2021111473A1Spinwave wave resonatorIMEC VZW·Filed 2019·Application pending·0 cites
- 1838US8723061B2MEMS switch and communication device using the sameNAITO YASUYUKI·Filed 2010·Granted May 13, 2014·0 cites·16 claims
- 1935US2011210801A1Temperature measurement system comprising a resonant mems deviceIMEC·Filed 2011·Application pending·0 cites
- 2034US2002000649A1Method of fabrication of a microstructure having an internal cavityFiled 2001·Application pending·0 cites
- 2133US2011175492A1Temperature Compensation Device and Method for MEMS ResonatorIMEC·Filed 2011·Application pending·0 cites
- 2229US2012305542A1Oven Controlled MEMS Oscillator DeviceDONNAY STEPHANE·Filed 2011·Application pending·0 cites
- 2329US2012188023A1Optimal Leg Design for MEMS ResonatorROTTENBERG XAVIER·Filed 2011·Application pending·0 cites
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