Inventor · disambiguated record
Joseph R. Monkowski
Also filed as: MONKOWSKI JOSEPH · MONKOWSKI JOSEPH R · MONKOWSKI JOSEPH RAYMOND
27 granted patents·3 pending applications·1,837 citations·filing 1980–2024
97Inventor score
Top patents by PatentIndex Score
30 records- 0198US5294778ACVD platen heater system utilizing concentric electric heating elementsLAM RES CORP·Filed 1991·Granted Mar 15, 1994·655 cites·9 claims
- 0298US4976996AChemical vapor deposition reactor and method of use thereofLAM RES CORP·Filed 1987·Granted Dec 11, 1990·687 cites·46 claims
- 0396US7823436B2Method and apparatus for in situ testing of gas flow controllersPIVOTAL SYSTEMS CORP·Filed 2009·Granted Nov 2, 2010·37 cites·4 claims
- 0494US8240324B2Method and apparatus for in situ testing of gas flow controllersMONKOWSKI JOSEPH R·Filed 2009·Granted Aug 14, 2012·29 cites·14 claims
- 0593US9400004B2Transient measurements of mass flow controllersMONKOWSKI JOSEPH R·Filed 2011·Granted Jul 26, 2016·16 cites·8 claims
- 0692US7757541B1Techniques for calibration of gas flowsPIVOTAL SYSTEMS CORP·Filed 2007·Granted Jul 20, 2010·23 cites·30 claims
- 0790US8271211B2Method and apparatus for enhancing in-situ gas flow measurement performanceCHUNG SHERK·Filed 2009·Granted Sep 18, 2012·25 cites·16 claims
- 0890US8265888B2Method and apparatus for enhancing in-situ gas flow measurement performanceCHUNG SHERK·Filed 2009·Granted Sep 11, 2012·25 cites·22 claims
- 0990US7590498B1System and method for vacuum chamber leak detectionPIVOTAL SYSTEMS CORP·Filed 2007·Granted Sep 15, 2009·33 cites·31 claims
- 1089US8857456B2Method and apparatus for in situ testing of gas flow controllersMONKOWSKI JOSEPH R·Filed 2012·Granted Oct 14, 2014·12 cites·21 claims
- 1189US8271210B2Method and apparatus for enhancing in-situ gas flow measurement performanceCHUNG SHERK·Filed 2009·Granted Sep 18, 2012·23 cites·22 claims
- 1289US8237928B2Method and apparatus for identifying the chemical composition of a gasMONKOWSKI JOSEPH R·Filed 2011·Granted Aug 7, 2012·7 cites·10 claims
- 1388US8667830B2Method and apparatus for in situ testing of gas flow controllersMONKOWSKI JOSEPH R·Filed 2010·Granted Mar 11, 2014·9 cites·15 claims
- 1487US9983595B2Method and apparatus for gas flow controlPIVOTAL SYSTEMS CORP·Filed 2016·Granted May 29, 2018·5 cites·20 claims
- 1586US8393197B2Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassingMONKOWSKI JOSEPH R·Filed 2009·Granted Mar 12, 2013·12 cites·20 claims
- 1685US9904297B2Method and apparatus for gas flow controlPIVOTAL SYSTEMS CORP·Filed 2014·Granted Feb 27, 2018·6 cites·12 claims
- 1783US9523435B2Method and apparatus for gas flow controlPIVOTAL SYSTEMS CORP·Filed 2014·Granted Dec 20, 2016·5 cites·16 claims
- 1882US10401202B2Method and apparatus for gas flow controlPIVOTAL SYSTEMS CORP·Filed 2016·Granted Sep 3, 2019·8 cites·9 claims
- 1982US7695984B1Use of modeled parameters for real-time semiconductor process metrology applied to semiconductor processesPIVOTAL SYSTEMS CORP·Filed 2006·Granted Apr 13, 2010·8 cites·22 claims
- 2082US5515238AThermoelectric module having reduced spacing between semiconductor elementsFiled 1995·Granted May 7, 1996·71 cites·19 claims
- 2181US7940395B2Method and apparatus for identifying the chemical composition of a gasPIVOTAL SYSTEMS CORP·Filed 2008·Granted May 10, 2011·6 cites·38 claims
- 2277US5104482ASimultaneous glass deposition and viscoelastic flow processLAM RES CORP·Filed 1991·Granted Apr 14, 1992·63 cites·21 claims
- 2373US7873052B2System and method for controlling process end-point utilizing legacy end-point systemPIVOTAL SYSTEMS CORP·Filed 2007·Granted Jan 18, 2011·5 cites·19 claims
- 2468US5434744AThermoelectric module having reduced spacing between semiconductor elementsFiled 1993·Granted Jul 18, 1995·27 cites·13 claims
- 2552US5722158AMethod of manufacture and resulting thermoelectric moduleFiled 1997·Granted Mar 3, 1998·15 cites·46 claims
- 2652US5091219AChemical vapor deposition methodLAM RES CORP·Filed 1990·Granted Feb 25, 1992·23 cites·30 claims
- 2752US2024385632A1Method and apparatus for controlled splitting of fluid flowsPIVOTAL SYSTEMS CORP·Filed 2024·Application pending·0 cites
- 2848US2016161953A1Mass Flow Controller with Multiple Communication ProtocolsMONKOWSKI JOSEPH·Filed 2014·Application pending·0 cites
- 2948US2011108126A1Method and apparatus for gas flow controlPIVOTAL SYSTEMS CORP·Filed 2010·Application pending·0 cites
- 3036US4415545ASolid film growth via preferential etching of liquid solutionsMONKOWSKI JOSEPH R·Filed 1980·Granted Nov 15, 1983·2 cites·44 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →