Inventor · disambiguated record
Masami Mizukami
Also filed as: MIZUKAMI MASAMI
8 granted patents·893 citations·filing 1992–2000
91Inventor score
Top patents by PatentIndex Score
8 records- 0198US6210486B1CVD film forming method in which a film formation preventing gas is supplied in a direction from a rear surface of an object to be processedTOKYO ELECTRON LTD·Filed 2000·Granted Apr 3, 2001·239 cites·6 claims
- 0293US5474410AMulti-chamber system provided with carrier unitsTEL VARIAN LIMITED·Filed 1994·Granted Dec 12, 1995·478 cites·10 claims
- 0380US6436203B1CVD apparatus and CVD methodTOKYO ELECTRON LTD·Filed 2000·Granted Aug 20, 2002·21 cites·10 claims
- 0480US5333986ATransfer apparatusTOKYO ELECTRON LTD·Filed 1992·Granted Aug 2, 1994·82 cites·20 claims
- 0570US6089184ACVD apparatus and CVD methodTOKYO ELECTRON LTD·Filed 1998·Granted Jul 18, 2000·35 cites·4 claims
- 0658US6045862ACVD film forming method in which a film formation preventing gas is supplied in a direction from a rear surface of an object to be processedTOKYO ELECTRON LTD·Filed 1998·Granted Apr 4, 2000·17 cites·5 claims
- 0747US6009667AHinge mechanism for supporting the open-close cover of a vacuum-process apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Jan 4, 2000·17 cites·20 claims
- 0840USD424583SHinge unit for vacuum-processing a semiconductor waferTOKYO ELECTRON LTD·Filed 1998·Granted May 9, 2000·4 cites·1 claims
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