Inventor · disambiguated record
Kentaro Kadonaga
Also filed as: KADONAGA KENTARO
8 granted patents·1 pending application·162 citations·filing 2007–2015
84Inventor score
Top patents by PatentIndex Score
9 records- 0196US8034673B2Film formation method and apparatus for forming silicon-containing insulating film doped with metalTOKYO ELECTRON LTD·Filed 2009·Granted Oct 11, 2011·74 cites·17 claims
- 0296US7964241B2Film formation method and apparatus for semiconductor processTOKYO ELECTRON LTD·Filed 2007·Granted Jun 21, 2011·75 cites·10 claims
- 0393US8753717B2Film forming method and film forming apparatusSUZUKI KEISUKE·Filed 2012·Granted Jun 17, 2014·10 cites·14 claims
- 0464US9142403B2Method of forming boron-containing silicon oxycarbonitride film and method of forming silicon oxycarbonitride filmTOKYO ELECTRON LTD·Filed 2013·Granted Sep 22, 2015·1 cites·10 claims
- 0561US9034718B2Film forming method for forming boron-added silicon nitride filmSUZUKI KEISUKE·Filed 2012·Granted May 19, 2015·1 cites·4 claims
- 0658US9076649B2Film forming method and apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Jul 7, 2015·1 cites·15 claims
- 0749US8871655B2Method of forming silicon oxycarbonitride filmTOKYO ELECTRON LTD·Filed 2012·Granted Oct 28, 2014·0 cites·10 claims
- 0843US9562285B2Film forming method, film forming apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Feb 7, 2017·0 cites·3 claims
- 0941US2013239893A1Stabilization method of film forming apparatus and film forming apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →