Inventor · disambiguated record
Edwin Johan Buis
Also filed as: BUIS EDWIN J · BUIS EDWIN JOHAN · OPBROEK HANS ENNO
30 granted patents·4 pending applications·188 citations·filing 1988–2022
96Inventor score
Files withASML NETHERLANDS BV21BUIS EDWIN JOHAN3DE VRIES GOSSE CHARLES3OCE NEDERLAND BV2HOL SVEN ANTOIN JOHAN1
Top patents by PatentIndex Score
34 records- 0184US5587779AApparatus for transferring toner imagesOCE NEDERLAND BV·Filed 1995·Granted Dec 24, 1996·41 cites·14 claims
- 0282US6498350B2Crash prevention in positioning apparatus for use in lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Dec 24, 2002·32 cites·16 claims
- 0381US9785051B2Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2013·Granted Oct 10, 2017·5 cites·29 claims
- 0478US6657204B2Cooling of voice coil motors in lithographic projection apparatusASML NETHERLANDS BV·Filed 2001·Granted Dec 2, 2003·19 cites·19 claims
- 0570US6831285B2Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Dec 14, 2004·15 cites·39 claims
- 0668US7602472B2Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a deviceASML NETHERLANDS BV·Filed 2007·Granted Oct 13, 2009·2 cites·28 claims
- 0768US7486384B2Lithographic support structureASML NETHERLANDS BV·Filed 2004·Granted Feb 3, 2009·11 cites·25 claims
- 0866US7700930B2Lithographic apparatus with rotation filter deviceASML NETHERLANDS BV·Filed 2007·Granted Apr 20, 2010·2 cites·22 claims
- 0966US7307689B2Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearingASML NETHERLANDS BV·Filed 2004·Granted Dec 11, 2007·10 cites·22 claims
- 1066US7057313B2Cooling of voice coil motorsASML NETHERLANDS BV·Filed 2004·Granted Jun 6, 2006·10 cites·18 claims
- 1165US9651772B2Arrangement for the actuation of at least one element in an optical systemZEISS CARL SMT GMBH·Filed 2015·Granted May 16, 2017·1 cites·28 claims
- 1265US9136151B2ActuatorVAN DER BLIJ FREDRIK WILHELM·Filed 2011·Granted Sep 15, 2015·3 cites·16 claims
- 1363US8817232B2Optical apparatus, and method of orienting a reflective elementBUIS EDWIN JOHAN·Filed 2010·Granted Aug 26, 2014·1 cites·22 claims
- 1463US8724081B2Lithographic apparatus and methodDE VRIES GOSSE CHARLES·Filed 2011·Granted May 13, 2014·1 cites·15 claims
- 1561US7518705B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 14, 2009·1 cites·21 claims
- 1660US8634062B2Actuator system, lithographic apparatus, method of controlling the position of a component and device manufacturing methodDE VRIES GOSSE CHARLES·Filed 2009·Granted Jan 21, 2014·1 cites·15 claims
- 1760US2025021026A1Apparatus for supplying liquid target material to a radiation sourceASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1860US2025275046A1Fuel droplet nozzle assemblyASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1956US6937316B2Lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Aug 30, 2005·5 cites·15 claims
- 2052US12139436B2Droplet generator nozzleASML NETHERLANDS BV·Filed 2020·Granted Nov 12, 2024·0 cites·20 claims
- 2152US9494878B2Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2013·Granted Nov 15, 2016·0 cites·15 claims
- 2252US5483269AProcess for the preparation of an image forming element and related printing deviceOCE NEDERLAND BV·Filed 1993·Granted Jan 9, 1996·12 cites·7 claims
- 2350US8279408B2Object support positioning device and lithographic apparatusBUIS EDWIN JOHAN·Filed 2009·Granted Oct 2, 2012·0 cites·26 claims
- 2450US7492440B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 17, 2009·2 cites·22 claims
- 2550US2008297758A1Lithographic support structureASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 2649US8757823B2Mountings for rotation of array of reflective elements and lithographic apparatus incorporating sameBUIS EDWIN JOHAN·Filed 2010·Granted Jun 24, 2014·0 cites·15 claims
- 2747US7629593B2Lithographic apparatus, radiation system, device manufacturing method, and radiation generating methodASML NETHERLANDS BV·Filed 2007·Granted Dec 8, 2009·0 cites·28 claims
- 2847US7224429B2Lithographic apparatus, device manufacturing method and positioning systemASML NETHERLANDS BV·Filed 2004·Granted May 29, 2007·3 cites·25 claims
- 2946US7088428B2Lithographic actuator mechanism, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 8, 2006·2 cites·21 claims
- 3041US8867021B2Illumination system, lithographic apparatus and method of adjusting an illumination modeDE VRIES GOSSE CHARLES·Filed 2010·Granted Oct 21, 2014·0 cites·19 claims
- 3140US9172294B2Planar motor and lithographic apparatus comprising such planar motorHOL SVEN ANTOIN JOHAN·Filed 2012·Granted Oct 27, 2015·0 cites·19 claims
- 3239US2004079898A1Cooling of voice coil motors in lithographic projection apparatusASML NETHERLANDS BV·Filed 2003·Application pending·0 cites
- 3334US4872358ADriving mechanism having a pressure memberPHILIPS CORP·Filed 1988·Granted Oct 10, 1989·4 cites·30 claims
- 3428US5757404AInkjet array and method of productionOCE NEDERLAND B·Filed 1995·Granted May 26, 1998·5 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Edwin Johan Buis files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →