Inventor · disambiguated record
Yukio Kakizaki
Also filed as: KAKIZAKI YUKIO
20 granted patents·761 citations·filing 1977–2008
96Inventor score
Top patents by PatentIndex Score
20 records- 0195US4770531AStage device with levelling mechanismNIPPON KOGAKU KK·Filed 1987·Granted Sep 13, 1988·91 cites·6 claims
- 0294US6040096AMask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatusNIKON CORP·Filed 1998·Granted Mar 21, 2000·120 cites·35 claims
- 0392US5894056AMask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatusNIKON CORP·Filed 1996·Granted Apr 13, 1999·91 cites·30 claims
- 0492US5337097AProjection optical apparatusNIPPON KOGAKU KK·Filed 1993·Granted Aug 9, 1994·83 cites·3 claims
- 0590US6583597B2Stage apparatus including non-containing gas bearings and microlithography apparatus comprising sameNIKON CORP·Filed 2001·Granted Jun 24, 2003·32 cites·62 claims
- 0687US4655584ASubstrate positioning apparatusNIPPON KOGAKU KK·Filed 1985·Granted Apr 7, 1987·66 cites·21 claims
- 0787US4113223ACross-movable carriageNIPPON KOGAKU KK·Filed 1977·Granted Sep 12, 1978·41 cites·4 claims
- 0884US5617211AExposure apparatusNIKON CORP·Filed 1995·Granted Apr 1, 1997·60 cites·19 claims
- 0978US4803373AConveyor arm apparatus with gap detectionNIKON CORP·Filed 1987·Granted Feb 7, 1989·53 cites·32 claims
- 1078US4422547AContainer for holding substrateNIPPON KOGAKU KK·Filed 1982·Granted Dec 27, 1983·46 cites·5 claims
- 1164US8749753B2Movable body apparatus, exposure apparatus and optical system unit, and device manufacturing methodTANAKA KEIICHI·Filed 2008·Granted Jun 10, 2014·2 cites·24 claims
- 1264US6570641B2Projection exposure apparatusNIKON CORP·Filed 2001·Granted May 27, 2003·6 cites·23 claims
- 1358US4716299AApparatus for conveying and inspecting a substrateNIPPON KOGAKU KK·Filed 1986·Granted Dec 29, 1987·25 cites·11 claims
- 1454US5929973AApparatus and method for simultaneously transferring a mask pattern to both sides of a substrateNIKON CORP·Filed 1996·Granted Jul 27, 1999·14 cites·22 claims
- 1552US4776693AForeign substance inspecting system including a calibration standardNIPPON KOGAKU KK·Filed 1987·Granted Oct 11, 1988·15 cites·8 claims
- 1647US6049372AExposure apparatusNIKON CORP·Filed 1997·Granted Apr 11, 2000·10 cites·37 claims
- 1733US4723846AOptical path length compensating optical system in an alignment apparatusNIPPON KOGAKU KK·Filed 1986·Granted Feb 9, 1988·3 cites·4 claims
- 1832US6317196B1Projection exposure apparatusNIKON CORP·Filed 1998·Granted Nov 13, 2001·3 cites·50 claims
- 1930USRE37352EProjection optical apparatusNIPPON KOGAKU KK·Filed 1996·Granted Sep 4, 2001·0 cites·45 claims
- 2029US4537501AApparatus for the attitude control of plate-form bodyNIPPON KOGAKU KK·Filed 1984·Granted Aug 27, 1985·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →