Inventor · disambiguated record
Theodorus G.M. Oosterlaken
Also filed as: OOSTERLAKEN THEODORUS · OOSTERLAKEN THEODORUS G M
36 granted patents·31 pending applications·524 citations·filing 2011–2025
96Inventor score
Top patents by PatentIndex Score
67 records- 0198US10103040B1Apparatus and method for manufacturing a semiconductor deviceASM IP HOLDING BV·Filed 2017·Granted Oct 16, 2018·466 cites·23 claims
- 0297US12203166B2Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicalsASM IP HOLDING BV·Filed 2021·Granted Jan 21, 2025·3 cites·16 claims
- 0395US11735445B2Substrate processing apparatus for processing substratesASM IP HOLDING BV·Filed 2021·Granted Aug 22, 2023·2 cites·20 claims
- 0494US12077854B2Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gasASM IP HOLDING BV·Filed 2022·Granted Sep 3, 2024·1 cites·19 claims
- 0591US11515187B2Fast FOUP swapping with a FOUP handlerASM IP HOLDING BV·Filed 2021·Granted Nov 29, 2022·2 cites·20 claims
- 0691US11232963B2Substrate processing apparatus and methodASM IP HOLDING BV·Filed 2018·Granted Jan 25, 2022·6 cites·21 claims
- 0787US11087997B2Substrate processing apparatus for processing substratesASM IP HOLDING BV·Filed 2018·Granted Aug 10, 2021·3 cites·25 claims
- 0887US9153466B2Wafer boatASM IP HOLDING BV·Filed 2013·Granted Oct 6, 2015·10 cites·7 claims
- 0986US2025101581A1Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicalsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1084US9991139B2Modular vertical furnace processing systemASM IP HOLDING BV·Filed 2013·Granted Jun 5, 2018·6 cites·24 claims
- 1184US2024392435A1Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gasASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1283US9048271B2Modular semiconductor processing systemOOSTERLAKEN THEODORUS G M·Filed 2011·Granted Jun 2, 2015·8 cites·20 claims
- 1382US11230766B2Substrate processing apparatus and methodASM IP HOLDING BV·Filed 2018·Granted Jan 25, 2022·3 cites·13 claims
- 1481US12183602B2Substrate processing apparatus for processing substratesASM IP HOLDING BV·Filed 2023·Granted Dec 31, 2024·0 cites·20 claims
- 1581US11024523B2Substrate processing apparatus and methodASM IP HOLDING BV·Filed 2018·Granted Jun 1, 2021·2 cites·14 claims
- 1680US10343907B2Method and system for delivering hydrogen peroxide to a semiconductor processing chamberASM IP HOLDING BV·Filed 2015·Granted Jul 9, 2019·3 cites·11 claims
- 1778US11121014B2Dummy wafer storage cassetteASM INT NV·Filed 2018·Granted Sep 14, 2021·2 cites·10 claims
- 1878US2025389485A1Apparatus for processing a plurality of substrates provided with an extractor chamberASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1975US10605530B2Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnaceASM IP HOLDING BV·Filed 2017·Granted Mar 31, 2020·2 cites·29 claims
- 2075US9837271B2Process for forming silicon-filled openings with a reduced occurrence of voidsASM IP HOLDING BV·Filed 2015·Granted Dec 5, 2017·2 cites·26 claims
- 2170US2025092520A1Semiconductor manufacturing apparatus and processASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2270US2025101589A1Gas injectorASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2369US12366410B2Apparatus for processing a plurality of substrates provided with an extractor chamberASM IP HOLDING BV·Filed 2022·Granted Jul 22, 2025·0 cites·17 claims
- 2468US11798830B2Fast FOUP swapping with a FOUP handlerASM IP HOLDING BV·Filed 2022·Granted Oct 24, 2023·0 cites·12 claims
- 2568US9431238B2Reactive curing process for semiconductor substratesASM IP HOLDING BV·Filed 2015·Granted Aug 30, 2016·1 cites·31 claims
- 2667US2024229237A9Ald deposition method and systemASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 2766US11804388B2Substrate processing apparatus and methodASM IP HOLDING BV·Filed 2021·Granted Oct 31, 2023·0 cites·18 claims
- 2866US2024141485A1Vapor phase precursor delivery systemASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 2966US2024360554A1Solid source chemical vaporizerASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3065US2024175137A1Vapor phase precursor delivery systemASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 3164US9443730B2Process for forming silicon-filled openings with a reduced occurrence of voidsASM IP HOLDING BV·Filed 2014·Granted Sep 13, 2016·1 cites·25 claims
- 3262US10319621B2Semiconductor processing assembly and facilityASM IP HOLDING BV·Filed 2013·Granted Jun 11, 2019·1 cites·17 claims
- 3362US2025034703A1Precursor delivery vessel, precursor delivery system, and precursor deposition apparatusASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3461US2025174475A1Support sleeve for supporting a process vessel and associated semiconductor processing furnacesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3561US2024420971A1Verticle furnace for processing a plurality of substrates and method of processingASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3661US2023111229A1Gas injector for a vertical furnaceASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 3760US11993847B2InjectorASM IP HOLDING BV·Filed 2021·Granted May 28, 2024·0 cites·18 claims
- 3859US2022268520A1Vertical furnace reactor assembly, method of aligning annular flange units, and useASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 3959US2024167157A1Gas injectorASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4059US2023002889A1Chemical vapor depospition furnace for depositing filmsASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 4158US2024003009A1Semiconductor processing apparatus for processing a plurality of substrates with cross flowASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4258US2025069911A1Apparatus constructed and arranged to process a plurality of substratesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4358US2025183065A1Flange and apparatus for processing substratesASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 4457US12243757B2Flange and apparatus for processing substratesASM IP HOLDING BV·Filed 2021·Granted Mar 4, 2025·0 cites·20 claims
- 4556US11971217B2Batch furnace assembly and method of operating a batch furnace assemblyASM IP HOLDING BV·Filed 2022·Granted Apr 30, 2024·0 cites·13 claims
- 4656US2024145262A1Gas injector assemblyASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4755US2023140283A1Semiconductor substrate processing apparatusASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 4855US2025290203A1Wafer boatASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 4955US2023134767A1Substrate processing apparatusASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 5054US2024068097A1Substrate processing apparatusASM IP HOLDING BV·Filed 2023·Application pending·0 cites
Showing the top 50 of 67 patent records by PatentIndex Score.
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