Inventor · disambiguated record
Ralf Degenhardt
Also filed as: DEGENHARDT RALF
12 granted patents·662 citations·filing 1992–2006
93Inventor score
Technology areasH01J
Files withINTEGRATED CIRCUIT TESTING8APPLIED MATERIALS INC1DEGENHARDT RALF1PHILIPS CORP1ZEISS STIFTUNG1
Top patents by PatentIndex Score
12 records- 0198US7274018B2Charged particle beam apparatus and method for operating the sameINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Sep 25, 2007·162 cites·10 claims
- 0298US7045781B2Charged particle beam apparatus and method for operating the sameINTEGRATED CIRCUIT TESTING·Filed 2004·Granted May 16, 2006·214 cites·19 claims
- 0397US6943349B2Multi beam charged particle deviceINTEGRATED CIRCUIT TESTING·Filed 2001·Granted Sep 13, 2005·126 cites·28 claims
- 0490US5319207AImaging system for charged particlesZEISS STIFTUNG·Filed 1992·Granted Jun 7, 1994·64 cites·25 claims
- 0587US8203119B2Charged particle beam device with retarding field analyzerDEGENHARDT RALF·Filed 2005·Granted Jun 19, 2012·28 cites·43 claims
- 0683US7429740B2Electric-magnetic field-generating element and assembling method for sameINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Sep 30, 2008·8 cites·28 claims
- 0773US5336885AElectron beam apparatusPHILIPS CORP·Filed 1992·Granted Aug 9, 1994·24 cites·18 claims
- 0872US7507956B2Charged particle beam energy width reduction system for charged particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Mar 24, 2009·9 cites·49 claims
- 0968US6576908B1Beam column for charged particle beam deviceAPPLIED MATERIALS INC·Filed 1999·Granted Jun 10, 2003·20 cites·20 claims
- 1060US7468517B2Single stage charged particle beam energy width reduction system for charged particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Dec 23, 2008·4 cites·27 claims
- 1157US7679054B2Double stage charged particle beam energy width reduction system for charged particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Mar 16, 2010·3 cites·33 claims
- 1250US7361897B2Imaging apparatus for high probe currentsINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Apr 22, 2008·0 cites·27 claims
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