Inventor · disambiguated record
Byoung-Sup Ahn
Also filed as: AHN BYOUNG-SUP
5 granted patents·2 pending applications·20 citations·filing 2005–2018
73Inventor score
Top patents by PatentIndex Score
7 records- 0193US9671686B2Exposure methods using e-beams and methods of manufacturing masks and semiconductor devices therefromCHOI JIN·Filed 2015·Granted Jun 6, 2017·8 cites·7 claims
- 0285US9116438B2Method of correcting flare and method of preparing extreme ultra violet maskLEE YOUNG-MI·Filed 2012·Granted Aug 25, 2015·8 cites·16 claims
- 0361US7927767B2Reflective photomasks and methods of determining layer thicknesses of the sameSAMSUNG ELECTRONICS CO LTD·Filed 2008·Granted Apr 19, 2011·4 cites·20 claims
- 0449US10497534B2Aperture system of electron beam apparatus, electron beam exposure apparatus, and electron beam exposure apparatus systemSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Dec 3, 2019·0 cites·20 claims
- 0543US9892884B2Exposure apparatus and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Feb 13, 2018·0 cites·16 claims
- 0636US2011065029A1Method of manufacturing mask structureSEO HWAN-SEOK·Filed 2010·Application pending·0 cites
- 0732US2006093961A1Method of verifying electron beam dataJANG SUNG-HOON·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →