Inventor · disambiguated record
Satohiro Okayama
Also filed as: OKAYAMA SATOHIRO
5 granted patents·11 pending applications·403 citations·filing 1996–2019
81Inventor score
Top patents by PatentIndex Score
16 records- 0195US5772770ASubstrate processing apparatusKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted Jun 30, 1998·314 cites·28 claims
- 0288US6742977B1Substrate processing device, substrate conveying device, and substrate processing methodKOKUSAI ELECTRIC CO LTD·Filed 2000·Granted Jun 1, 2004·75 cites·18 claims
- 0354US2020080189A1Acrylic vaporizerULVAC INC·Filed 2019·Application pending·0 cites
- 0452US6485604B1Substrate processing apparatusKOKUSAI ELECTRIC CO LTD·Filed 1999·Granted Nov 26, 2002·14 cites·20 claims
- 0547US2011107969A1Apparatus for manufacturing thin-film solar cellULVAC INC·Filed 2009·Application pending·0 cites
- 0647US2011100296A1Film formation apparatusULVAC INC·Filed 2009·Application pending·0 cites
- 0747US2011100297A1Thin-film solar cell manufacturing apparatusULVAC INC·Filed 2009·Application pending·0 cites
- 0847US2011120370A1Thin-film solar cell manufacturing apparatusULVAC INC·Filed 2009·Application pending·0 cites
- 0947US2011189384A1Thin-film solar cell manufacturing apparatusULVAC INC·Filed 2009·Application pending·0 cites
- 1045US2011094445A1Apparatus for manufacturing thin-film solar cellULVAC INC·Filed 2009·Application pending·0 cites
- 1143US2011094446A1Thin-film solar cell manufacturing apparatusULVAC INC·Filed 2009·Application pending·0 cites
- 1240US2011300694A1Electrode circuit, film formation device, electrode unit, and film formation methodMATSUMOTO KOICHI·Filed 2009·Application pending·0 cites
- 1337US9595418B2Ion beam irradiation deviceULVAC INC·Filed 2013·Granted Mar 14, 2017·0 cites·9 claims
- 1437US8957351B2Catalytic CVD equipment, method for formation of film, process for production of solar cell, and substrate holderSHIMA MASAKI·Filed 2012·Granted Feb 17, 2015·0 cites·8 claims
- 1531US2001035124A1Substrate processing apparatus and semiconductor manufacturing methodFiled 2001·Application pending·0 cites
- 1627US2012190176A1Catalytic cvd equipment, method for formation of film, and process for production of solar cellKAI MOTOHIDE·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →