Inventor · disambiguated record

Pao-Tsung Lai

Also filed as: LAI PAO-TSUNG

1 granted patent·3 citations·filing 2013–2013

21Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG CO LTD1

Top patents by PatentIndex Score

1 record

0166US9051649B2Semiconductor film deposition apparatus and method with improved heater cooling efficiencyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 9, 2015·3 cites·18 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →