Inventor · disambiguated record
Dirk Efferenn
Also filed as: EFFERENN DIRK
7 granted patents·14 citations·filing 2002–2004
77Inventor score
Top patents by PatentIndex Score
7 records- 0152US6770530B2Method for producing a shallow trench isolation for n- and p-channel field-effect transistors in a semiconductor moduleINFINEON TECHNOLOGIES AG·Filed 2003·Granted Aug 3, 2004·6 cites·10 claims
- 0251US7261829B2Method for masking a recess in a structure having a high aspect ratioINFINEON TECHNOLOGIES AG·Filed 2003·Granted Aug 28, 2007·4 cites·9 claims
- 0343US7157381B2Method for providing whisker-free aluminum metal lines or aluminum alloy lines in integrated circuitsNANYA TECHNOLOGY CORP·Filed 2004·Granted Jan 2, 2007·2 cites·7 claims
- 0441US7413993B2Process for removing a residue from a metal structure on a semiconductor substrateINFINEON TECHNOLOGIES AG·Filed 2004·Granted Aug 19, 2008·1 cites·27 claims
- 0539US6964912B2Method for fabricating a semiconductor structureINFINEON TECHNOLOGIES AG·Filed 2003·Granted Nov 15, 2005·1 cites·7 claims
- 0636US6716720B2Method for filling depressions on a semiconductor waferINFINEON TECHNOLOGIES AG·Filed 2003·Granted Apr 6, 2004·0 cites·9 claims
- 0733US7125778B2Method for fabricating a self-aligning maskINFINEON TECHNOLOGIES AG·Filed 2002·Granted Oct 24, 2006·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →