Inventor · disambiguated record
Andrew Guzman
Also filed as: GUZMAN ANDREW · GUZMAN ANDREW J
6 granted patents·60 citations·filing 2000–2020
80Inventor score
Top patents by PatentIndex Score
6 records- 0188US6398373B1Pneumatic control system and method for shaping deformable mirrors in lithographic projection systemsASML US INC·Filed 2000·Granted Jun 4, 2002·47 cites·13 claims
- 0269USRE46099EMethod of using deformable mirror using piezoelectric actuators formed as an integrated circuitASML HOLDING NV·Filed 2015·Granted Aug 9, 2016·1 cites·14 claims
- 0366US7372614B2Method of using deformable mirror using piezoelectric actuators formed as an integrated circuitASML HOLDING NV·Filed 2005·Granted May 13, 2008·6 cites·5 claims
- 0461USRE45511EMethod of using deformable mirror using piezoelectric actuators formed as an integrated circuitGOVIL PRADEEP K·Filed 2010·Granted May 12, 2015·1 cites·16 claims
- 0551US11971606B2Adjustable alignment mountMASSACHUSETTS INST TECHNOLOGY·Filed 2020·Granted Apr 30, 2024·0 cites·22 claims
- 0646US7224504B2Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of useASML HOLDING NV·Filed 2003·Granted May 29, 2007·5 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →