Inventor · disambiguated record
Yoshio Kumagai
Also filed as: KUMAGAI YOSHIO
8 granted patents·433 citations·filing 1979–2001
90Inventor score
Top patents by PatentIndex Score
8 records- 0195US5015330AFilm forming method and film forming deviceTOSHIBA KK·Filed 1990·Granted May 14, 1991·141 cites·6 claims
- 0285US5845660ASubstrate washing and drying apparatus, substrate washing method, and substrate washing apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Dec 8, 1998·84 cites·20 claims
- 0384US6001191ASubstrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Dec 14, 1999·76 cites·8 claims
- 0482US6620260B2Substrate rinsing and drying methodTOKYO ELECTRON LTD·Filed 2001·Granted Sep 16, 2003·28 cites·8 claims
- 0572US5873177ASpin dryer and substrate drying methodTOKYO ELECTRON LTD·Filed 1997·Granted Feb 23, 1999·44 cites·26 claims
- 0658US5236515ACleaning deviceTOKYO ELECTRON LTD·Filed 1991·Granted Aug 17, 1993·29 cites·22 claims
- 0756US5188136ACleaning deviceTOKYO ELECTRON LTD·Filed 1991·Granted Feb 23, 1993·28 cites·9 claims
- 0833US4272964ASteam generating apparatusHITACHI LTD·Filed 1979·Granted Jun 16, 1981·3 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →