Inventor · disambiguated record
Mohammad Kamarehi
Also filed as: KAMAREHI MOHAMMAD
27 granted patents·2 pending applications·856 citations·filing 1984–2024
97Inventor score
Files withFUSION SYSTEMS CORP7MKS INSTR INC7LAM RES CORP5FUSION LIGHTING INC3MATRIX INTEGRATED SYSTEMS INC3
Top patents by PatentIndex Score
29 records- 0197US6263830B1Microwave choke for remote plasma generatorMATRIX INTEGRATED SYSTEMS INC·Filed 2000·Granted Jul 24, 2001·87 cites·25 claims
- 0297US4749915AMicrowave powered electrodeless light source utilizing de-coupled modesFUSION SYSTEMS CORP·Filed 1986·Granted Jun 7, 1988·114 cites·1 claims
- 0397US4633140AElectrodeless lamp having staggered turn-on of microwave sourcesFUSION SYSTEMS CORP·Filed 1984·Granted Dec 30, 1986·91 cites·7 claims
- 0495US11222770B2Microwave applicator with solid-state generator power sourceMKS INSTR INC·Filed 2020·Granted Jan 11, 2022·10 cites·10 claims
- 0594US5594303AApparatus for exciting an electrodeless lamp with an increasing electric field intensityFUSION LIGHTING INC·Filed 1995·Granted Jan 14, 1997·114 cites·10 claims
- 0693US5227698AMicrowave lamp with rotating fieldFUSION SYSTEMS CORP·Filed 1992·Granted Jul 13, 1993·101 cites·41 claims
- 0791US4954755AElectrodeless lamp having hybrid cavityFUSION SYSTEMS CORP·Filed 1988·Granted Sep 4, 1990·50 cites·6 claims
- 0889US10790118B2Microwave applicator with solid-state generator power sourceMKS INSTR INC·Filed 2017·Granted Sep 29, 2020·7 cites·33 claims
- 0988US11956885B2Method and apparatus for impedance matching in a power delivery system for remote plasma generationMKS INSTR INC·Filed 2021·Granted Apr 9, 2024·3 cites·23 claims
- 1085US9831066B1Compact microwave plasma applicator utilizing conjoining electric fieldsMKS INSTR INC·Filed 2016·Granted Nov 28, 2017·5 cites·22 claims
- 1185US7638004B1Method for cleaning microwave applicator tubeLAM RES CORP·Filed 2006·Granted Dec 29, 2009·8 cites·28 claims
- 1285US5498308APlasma asher with microwave trapFUSION SYSTEMS CORP·Filed 1994·Granted Mar 12, 1996·53 cites·12 claims
- 1381US6352050B2Remote plasma mixerMATRIX INTEGRATED SYSTEMS INC·Filed 2000·Granted Mar 5, 2002·30 cites·23 claims
- 1481US5841242AElectrodeless lamp with elimination of arc attachmentFUSION LIGHTING INC·Filed 1997·Granted Nov 24, 1998·36 cites·5 claims
- 1579US5961851AMicrowave plasma discharge deviceFUSION SYSTEMS CORP·Filed 1996·Granted Oct 5, 1999·37 cites·11 claims
- 1678US7554053B2Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma systemLAM RES CORP·Filed 2005·Granted Jun 30, 2009·3 cites·52 claims
- 1776US6439155B1Remote plasma generator with sliding short tunerMATRIX INTEGRATEA SYSTEMS INC·Filed 2000·Granted Aug 27, 2002·28 cites·20 claims
- 1876US5831386AElectrodeless lamp with improved efficacyFUSION LIGHTING INC·Filed 1994·Granted Nov 3, 1998·33 cites·11 claims
- 1975US7183514B2Helix coupled remote plasma sourceAXCELIS TECH INC·Filed 2004·Granted Feb 27, 2007·10 cites·28 claims
- 2073US8048329B2Methods for implementing highly efficient plasma trapsLAM RES CORP·Filed 2009·Granted Nov 1, 2011·6 cites·20 claims
- 2171US12289820B2Method and apparatus for impedance matching in a power delivery system for remote plasma generationMKS INSTR INC·Filed 2024·Granted Apr 29, 2025·0 cites·20 claims
- 2271US6412438B2Downstream sapphire elbow joint for remote plasma generatorMATRIX INTEGRATED SYSTEMS INC·Filed 2000·Granted Jul 2, 2002·17 cites·22 claims
- 2361US7562638B2Methods and arrangement for implementing highly efficient plasma trapsLAM RES CORP·Filed 2005·Granted Jul 21, 2009·2 cites·30 claims
- 2452US11476092B2System and method of power generation with phase linked solid-state generator modulesMKS INSTR INC·Filed 2020·Granted Oct 18, 2022·0 cites·17 claims
- 2548US2022243333A1Microwave System for Microwave-Assisted Surface Chemistry Annealing of ALD Processes Utilizing Microwave Radiation EnergyMKS INSTR INC·Filed 2022·Application pending·0 cites
- 2647US7679024B2Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamberLAM RES CORP·Filed 2005·Granted Mar 16, 2010·0 cites·24 claims
- 2742US6031320ADevice for cooling electrodeless lamp with supersonic outlet jets and a staggered manifoldFiled 1998·Granted Feb 29, 2000·5 cites·8 claims
- 2837US5767626AElectrodeless lamp starting/operation with sources at different frequenciesFUSION SYSTEMS CORP·Filed 1995·Granted Jun 16, 1998·6 cites·17 claims
- 2936US2002007912A1Coolant for plasma generatorFiled 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →