Inventor · disambiguated record
Vijay Kumar Badam
Also filed as: BADAM VIJAY · BADAM VIJAY KUMAR
7 granted patents·1 pending application·27 citations·filing 2009–2016
80Inventor score
Files withLAM RES AG3ASML NETHERLANDS BV1DE GRAAF ROELOF FREDERIK1DZIOMKINA NINA VLADIMIROVNA1HOHENWARTER KARL-HEINZ1
Top patents by PatentIndex Score
8 records- 0188US9245777B2Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatusLAM RES AG·Filed 2013·Granted Jan 26, 2016·11 cites·20 claims
- 0283US8823919B2Lithographic apparatus, removable member and device manufacturing methodDZIOMKINA NINA VLADIMIROVNA·Filed 2010·Granted Sep 2, 2014·5 cites·20 claims
- 0381US8659741B2Lithographic apparatus, removable member and device manufacturing methodDE GRAAF ROELOF FREDERIK·Filed 2010·Granted Feb 25, 2014·4 cites·20 claims
- 0478US9748120B2Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatusLAM RES AG·Filed 2013·Granted Aug 29, 2017·6 cites·11 claims
- 0557US9316443B2Method and apparatus for liquid treatment of wafer shaped articlesHOHENWARTER KARL-HEINZ·Filed 2012·Granted Apr 19, 2016·1 cites·13 claims
- 0648US9685358B2Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatusLAM RES AG·Filed 2016·Granted Jun 20, 2017·0 cites·20 claims
- 0747US2011273679A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 0846US8780321B2Lithographic apparatus and device manufacturing methodKNAAPEN THIJS EGIDIUS JOHANNES·Filed 2009·Granted Jul 15, 2014·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →