Inventor · disambiguated record
Teunis Van De Peut
Also filed as: VAN DE PEUT TEUNIS
15 granted patents·1 pending application·76 citations·filing 2011–2018
91Inventor score
Files withMAPPER LITHOGRAPHY IP BV4WIELAND MARCO JAN-JACO4VAN DE PEUT TEUNIS3ASML NETHERLANDS BV2DE BOER GUIDO1
Top patents by PatentIndex Score
16 records- 0194US9691589B2Dual pass scanningVAN DE PEUT TEUNIS·Filed 2011·Granted Jun 27, 2017·11 cites·24 claims
- 0294US8598544B2Method of generating a two-level pattern for lithographic processing and pattern generator using the sameVAN DE PEUT TEUNIS·Filed 2011·Granted Dec 3, 2013·24 cites·28 claims
- 0393US9978562B2Method for exposing a waferMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted May 22, 2018·13 cites·22 claims
- 0484US8604411B2Charged particle beam modulatorWIELAND MARCO JAN-JACO·Filed 2011·Granted Dec 10, 2013·6 cites·31 claims
- 0580US8921758B2Modulation device and charged particle multi-beamlet lithography system using the sameWIELAND MARCO JAN-JACO·Filed 2011·Granted Dec 30, 2014·4 cites·30 claims
- 0679US9036962B2Arrangement of optical fibers, and a method of forming such arrangementDE BOER GUIDO·Filed 2012·Granted May 19, 2015·5 cites·13 claims
- 0778US8884255B2Data path for lithography apparatusDERKS HENK·Filed 2011·Granted Nov 11, 2014·6 cites·30 claims
- 0877US9457549B2Method for forming an optical fiber arrayMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Oct 4, 2016·2 cites·19 claims
- 0976US8710465B2Pattern data conversion for lithography systemVAN DE PEUT TEUNIS·Filed 2011·Granted Apr 29, 2014·4 cites·62 claims
- 1063US10297420B2Charged particle lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted May 21, 2019·0 cites·35 claims
- 1161USRE48287EMethod for forming an optical fiber arrayASML NETHERLANDS BV·Filed 2018·Granted Oct 27, 2020·0 cites·19 claims
- 1260US10692696B2Deflection scan speed adjustment during charged particle exposureASML NETHERLANDS BV·Filed 2014·Granted Jun 23, 2020·0 cites·17 claims
- 1360US9305747B2Data path for lithography apparatusWIELAND MARCO JAN-JACO·Filed 2011·Granted Apr 5, 2016·1 cites·18 claims
- 1444US9287081B2Lithography system, modulation device and method of manufacturing a fiber fixation substrateVAN MELLE RALPH·Filed 2011·Granted Mar 15, 2016·0 cites·22 claims
- 1539US2013120724A1Method for splitting a pattern for use in a multi-beamlet lithography apparatusWIELAND MARCO JAN-JACO·Filed 2012·Application pending·0 cites
- 1635US9455122B2Modulation device and power supply arrangementMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Sep 27, 2016·0 cites·20 claims
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