Assignee
DE BOER GUIDO
NL·12 granted patents·35 citations·filing 2008–2012
Top patents by PatentIndex Score
12 records- 0190US9395635B2Position determination in a lithography system using a substrate having a partially reflective position markDE BOER GUIDO·Filed 2012·Granted Jul 19, 2016·7 cites·16 claims
- 0287US8570055B2Capacitive sensing systemDE BOER GUIDO·Filed 2010·Granted Oct 29, 2013·8 cites·20 claims
- 0381US9069265B2Interferometer moduleDE BOER GUIDO·Filed 2012·Granted Jun 30, 2015·4 cites·25 claims
- 0481US8638109B2Capacitive sensing system with differential pairsDE BOER GUIDO·Filed 2010·Granted Jan 28, 2014·4 cites·24 claims
- 0579US9036962B2Arrangement of optical fibers, and a method of forming such arrangementDE BOER GUIDO·Filed 2012·Granted May 19, 2015·5 cites·13 claims
- 0678US9261800B2Alignment of an interferometer module for use in an exposure toolDE BOER GUIDO·Filed 2012·Granted Feb 16, 2016·2 cites·18 claims
- 0771US8705010B2Lithography system, method of clamping and wafer tableDE BOER GUIDO·Filed 2008·Granted Apr 22, 2014·2 cites·30 claims
- 0871US8513959B2Integrated sensor systemDE BOER GUIDO·Filed 2010·Granted Aug 20, 2013·1 cites·22 claims
- 0968US9201315B2Lithography system for processing a target, such as a wafer, a method for operating a lithography system for processing a target, such as a wafer and a substrate for use in such a lithography systemDE BOER GUIDO·Filed 2012·Granted Dec 1, 2015·2 cites·29 claims
- 1055US9678443B2Lithography system with differential interferometer moduleDE BOER GUIDO·Filed 2012·Granted Jun 13, 2017·0 cites·42 claims
- 1148US8895943B2Lithography system and method of processing substrates in such a lithography systemDE BOER GUIDO·Filed 2011·Granted Nov 25, 2014·0 cites·28 claims
- 1246US9395636B2Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a waferDE BOER GUIDO·Filed 2012·Granted Jul 19, 2016·0 cites·12 claims
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