Inventor · disambiguated record
Marcel Heller
Also filed as: HELLER MARCEL
6 granted patents·2 pending applications·1 citations·filing 2008–2020
69Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0165US9029049B2Method for processing a carrier, a carrier, an electronic device and a lithographic maskINFINEON TECHNOLOGIES AG·Filed 2013·Granted May 12, 2015·1 cites·17 claims
- 0256US10241391B2Method for processing a carrier, a carrier, an electronic device and a lithographic maskINFINEON TECHNOLOGIES AG·Filed 2017·Granted Mar 26, 2019·0 cites·13 claims
- 0352US9613812B2Method for processing a carrier, a carrier, an electronic device and a lithographic maskINFINEON TECHNOLOGIES AG·Filed 2015·Granted Apr 4, 2017·0 cites·11 claims
- 0450US9437440B2Method for manufacturing a semiconductor deviceINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2013·Granted Sep 6, 2016·0 cites·17 claims
- 0549US9837280B2Methods for manufacturing semiconductor devicesINFINEON TECHNOLOGIES DRESDEN GMBH·Filed 2016·Granted Dec 5, 2017·0 cites·6 claims
- 0645US11640908B2Method of implanting an implant species into a substrate at different depthsINFINEON TECHNOLOGIES AG·Filed 2020·Granted May 2, 2023·0 cites·16 claims
- 0734US2009317644A1Methods for Manufacturing a Structure on a Substrate, Method for Manufacturing a Semiconductor Device and an Intermediate ProductHELLER MARCEL·Filed 2008·Application pending·0 cites
- 0834US2009311419A1Method and apparatus for resist developmentFOERSTER ANITA·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →