Inventor · disambiguated record
Mark Harless
Also filed as: HARLESS MARK · HARLESS MARK R
15 granted patents·3 pending applications·557 citations·filing 1999–2016
94Inventor score
Files withRUDOLPH TECHNOLOGIES INC7AUGUST TECHNOLOGY CORP5HARLESS MARK1O'DELL JEFFREY1O'DELL JEFFREY L1
Top patents by PatentIndex Score
18 records- 0197US6324298B1Automated wafer defect inspection system and a process of performing such inspectionAUGUST TECHNOLOGY CORP·Filed 1999·Granted Nov 27, 2001·310 cites·26 claims
- 0294US6937753B1Automated wafer defect inspection system and a process of performing such inspectionAUGUST TECHNOLOGY CORP·Filed 2000·Granted Aug 30, 2005·96 cites·7 claims
- 0393US6826298B1Automated wafer defect inspection system and a process of performing such inspectionAUGUST TECHNOLOGY CORP·Filed 2000·Granted Nov 30, 2004·53 cites·5 claims
- 0492US9464992B2Automated wafer defect inspection system and a process of performing such inspectionRUDOLPH TECH INC·Filed 2016·Granted Oct 11, 2016·6 cites·11 claims
- 0592US7729528B2Automated wafer defect inspection system and a process of performing such inspectionRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted Jun 1, 2010·43 cites·53 claims
- 0682US7196300B2Dynamic focusing method and apparatusRUDOLPH TECHNOLOGIES INC·Filed 2005·Granted Mar 27, 2007·9 cites·26 claims
- 0777US7822260B2Edge inspectionRUDOLPH TECHNOLOGIES INC·Filed 2008·Granted Oct 26, 2010·5 cites·3 claims
- 0877US7340087B2Edge inspectionRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted Mar 4, 2008·14 cites·36 claims
- 0975US7703823B2Wafer holding mechanismRUDOLPH TECHNOLOGIES INC·Filed 2005·Granted Apr 27, 2010·5 cites·27 claims
- 1068US8130372B2Wafer holding mechanismHARLESS MARK·Filed 2010·Granted Mar 6, 2012·3 cites·1 claims
- 1164US9337071B2Automated wafer defect inspection system and a process of performing such inspectionO'DELL JEFFREY L·Filed 2010·Granted May 10, 2016·1 cites·44 claims
- 1254US7629993B2Automated wafer defect inspection system using backside illuminationRUDOLPH TECHNOLOGIES INC·Filed 2002·Granted Dec 8, 2009·3 cites·16 claims
- 1353US2012087569A1Automated wafer defect inspection system and a process of performing such inspectionO'DELL JEFFREY·Filed 2011·Application pending·0 cites
- 1452US7170075B2Inspection tool with a 3D point sensor to develop a focus mapRUDOLPH TECHNOLOGIES INC·Filed 2003·Granted Jan 30, 2007·6 cites·21 claims
- 1547US7111095B2Data transfer device with data frame grabber with switched fabric interface wherein data is distributed across network over virtual laneAUGUST TECHNOLOGY CORP·Filed 2003·Granted Sep 19, 2006·2 cites·14 claims
- 1646US7321108B2Dynamic focusing method and apparatusRUDOLPH TECHNOLOGY INC·Filed 2007·Granted Jan 22, 2008·1 cites·21 claims
- 1738US2004179096A1Imaging system using theta-theta coordinate stage and continuous image rotation to compensate for stage rotationAUGUST TECHNOLOGY CORP·Filed 2003·Application pending·0 cites
- 1835US2007057164A1Scheimpflug normalizerVAUGHNN DAVID·Filed 2006·Application pending·0 cites
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