Inventor · disambiguated record
Henry Pearce-Percy
Also filed as: PEARCE-PERCY HENRY · PEARCE-PERCY HENRY THOMAS
7 granted patents·1 pending application·836 citations·filing 1994–2008
86Inventor score
Top patents by PatentIndex Score
8 records- 0195US5578821AElectron beam inspection system and methodKLA INSTR CORP·Filed 1995·Granted Nov 26, 1996·421 cites·51 claims
- 0295US5502306AElectron beam inspection system and methodKLA INSTR CORP·Filed 1994·Granted Mar 26, 1996·400 cites·35 claims
- 0383US7427765B2Electron beam column for writing shaped electron beamsJEOL LTD·Filed 2005·Granted Sep 23, 2008·6 cites·18 claims
- 0479US7800075B2Multi-function module for an electron beam columnBULLER BENYAMIN·Filed 2008·Granted Sep 21, 2010·4 cites·12 claims
- 0574US7227155B2Electrostatic deflection system with impedance matching for high positioning accuracyAPPLIED MATERIALS INC·Filed 2005·Granted Jun 5, 2007·3 cites·20 claims
- 0670US7514682B2Electron anti-fogging baffle used as a detectorAPPLIED MATERIALS INC·Filed 2006·Granted Apr 7, 2009·2 cites·20 claims
- 0750US7315029B2Electrostatic deflection system with low aberrations and vertical beam incidenceAPPLIED MATERIALS INC·Filed 2005·Granted Jan 1, 2008·0 cites·19 claims
- 0834US2002145118A1Detection of backscattered electrons from a substrateAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
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