Inventor · disambiguated record
Uday Pai
Also filed as: PAI UDAY
9 granted patents·4 pending applications·13 citations·filing 2010–2023
81Inventor score
Top patents by PatentIndex Score
13 records- 0184US9343274B2Process kit shield for plasma enhanced processing chamberAPPLIED MATERIALS INC·Filed 2014·Granted May 17, 2016·2 cites·9 claims
- 0282US9960021B2Physical vapor deposition (PVD) target having low friction padsAPPLIED MATERIALS INC·Filed 2014·Granted May 1, 2018·5 cites·13 claims
- 0375US8647485B2Process kit shield for plasma enhanced processing chamberRASHEED MUHAMMAD·Filed 2012·Granted Feb 11, 2014·4 cites·7 claims
- 0471US11950384B2Dynamic electrical and fluid delivery system with indexing motion for batch processing chambersAPPLIED MATERIALS INC·Filed 2023·Granted Apr 2, 2024·0 cites·19 claims
- 0568US11440159B2Edge load ringAPPLIED MATERIALS INC·Filed 2020·Granted Sep 13, 2022·0 cites·20 claims
- 0664US11602064B2Dynamic electrical and fluid delivery system with indexing motion for batch processing chambersAPPLIED MATERIALS INC·Filed 2020·Granted Mar 7, 2023·0 cites·20 claims
- 0764US8702918B2Apparatus for enabling concentricity of plasma dark spaceRITCHIE ALAN·Filed 2011·Granted Apr 22, 2014·1 cites·20 claims
- 0863US9303311B2Substrate processing system with mechanically floating target assemblyYOUNG DONNY·Filed 2012·Granted Apr 5, 2016·1 cites·20 claims
- 0950US2022213590A1Methods and apparatus for processing a substrate using improved shield configurationsAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1043US10199204B2Target retaining apparatusAPPLIED MATERIALS INC·Filed 2015·Granted Feb 5, 2019·0 cites·20 claims
- 1138US2021143320A1Fabrication of piezoelectric device with pmnpt layerAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 1238US2023320223A1Deposition methods and apparatus for piezoelectric applicationsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1336US2011164955A1Processing chamber with translating wear plate for lift pinAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
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