Inventor · disambiguated record
Younus Vora
Also filed as: VORA YOUNUS
5 granted patents·86 citations·filing 1992–2014
79Inventor score
Top patents by PatentIndex Score
5 records- 0191US8896827B2Diode laser based broad band light sources for wafer inspection toolsKLA TENCOR CORP·Filed 2013·Granted Nov 25, 2014·10 cites·21 claims
- 0289US8073240B2Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a waferFISCHER VERLYN·Filed 2008·Granted Dec 6, 2011·28 cites·19 claims
- 0375US5386317AMethod and apparatus for imaging dense linewidth features using an optical microscopePROMETRIX CORP·Filed 1992·Granted Jan 31, 1995·46 cites·26 claims
- 0471US9110037B2Diode laser based broad band light sources for wafer inspection toolsKLA TENCOR CORP·Filed 2014·Granted Aug 18, 2015·1 cites·19 claims
- 0559US9534848B2Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperaturesKLA TENCOR CORP·Filed 2013·Granted Jan 3, 2017·1 cites·18 claims
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