Inventor · disambiguated record
Anant Chimmalgi
Also filed as: CHIMMALGI ANANT
25 granted patents·6 pending applications·107 citations·filing 2012–2023
94Inventor score
Top patents by PatentIndex Score
31 records- 0193US9390902B2Method and system for controlling convective flow in a light-sustained plasmaKLA TENCOR CORP·Filed 2014·Granted Jul 12, 2016·13 cites·19 claims
- 0293US9318311B2Plasma cell for laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2012·Granted Apr 19, 2016·21 cites·46 claims
- 0393US9263238B2Open plasma lamp for forming a light-sustained plasmaKLA TENCOR CORP·Filed 2015·Granted Feb 16, 2016·10 cites·39 claims
- 0491US9927094B2Plasma cell for providing VUV filtering in a laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2013·Granted Mar 27, 2018·11 cites·23 claims
- 0591US8896827B2Diode laser based broad band light sources for wafer inspection toolsKLA TENCOR CORP·Filed 2013·Granted Nov 25, 2014·10 cites·21 claims
- 0689US9530636B2Light source with nanostructured antireflection layerKLA TENCOR CORP·Filed 2015·Granted Dec 27, 2016·7 cites·49 claims
- 0788US9721761B2Open plasma lamp for forming a light-sustained plasmaKLA TENCOR CORP·Filed 2016·Granted Aug 1, 2017·4 cites·70 claims
- 0888US8853655B2Gas refraction compensation for laser-sustained plasma bulbsBEZEL ILYA·Filed 2014·Granted Oct 7, 2014·8 cites·20 claims
- 0987US9615439B2System and method for inhibiting radiative emission of a laser-sustained plasma sourceKLA TENCOR CORP·Filed 2016·Granted Apr 4, 2017·5 cites·31 claims
- 1086US10244613B2System and method for electrodeless plasma ignition in laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2016·Granted Mar 26, 2019·5 cites·34 claims
- 1183US10032620B2Broadband light source including transparent portion with high hydroxide contentKLA TENCOR CORP·Filed 2015·Granted Jul 24, 2018·3 cites·14 claims
- 1282US9941655B2High power broadband light sourceKLA TENCOR CORP·Filed 2015·Granted Apr 10, 2018·3 cites·44 claims
- 1377US10283342B2Laser sustained plasma light source with graded absorption featuresKLA TENCOR CORP·Filed 2016·Granted May 7, 2019·2 cites·35 claims
- 1475US9899205B2System and method for inhibiting VUV radiative emission of a laser-sustained plasma sourceKLA TENCOR CORP·Filed 2016·Granted Feb 20, 2018·2 cites·82 claims
- 1571US9110037B2Diode laser based broad band light sources for wafer inspection toolsKLA TENCOR CORP·Filed 2014·Granted Aug 18, 2015·1 cites·19 claims
- 1669US2021231292A1Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light SourceKLA CORP·Filed 2021·Application pending·0 cites
- 1761US10976025B2Plasma cell for providing VUV filtering in a laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2018·Granted Apr 13, 2021·0 cites·8 claims
- 1861US10522340B2Broadband light source including transparent portion with high hydroxide contentKLA TENCOR CORP·Filed 2018·Granted Dec 31, 2019·0 cites·20 claims
- 1961US9232622B2Gas refraction compensation for laser-sustained plasma bulbsKLA TENCOR CORP·Filed 2014·Granted Jan 5, 2016·1 cites·18 claims
- 2059US9534848B2Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperaturesKLA TENCOR CORP·Filed 2013·Granted Jan 3, 2017·1 cites·18 claims
- 2158US12240164B2Window variability correction in additive manufacturingCARBON INC·Filed 2021·Granted Mar 4, 2025·0 cites·13 claims
- 2257US11104061B2Stereolithography apparatus with individually addressable light source arraysCARBON INC·Filed 2019·Granted Aug 31, 2021·0 cites·16 claims
- 2357US2023330935A1Light source variability correction in additive manufacturingCARBON INC·Filed 2023·Application pending·0 cites
- 2456US9887076B2Method and system for controlling convective flow in a light-sustained plasmaKLA TENCOR CORP·Filed 2016·Granted Feb 6, 2018·0 cites·18 claims
- 2553US11084207B2Window variability correction in additive manufacturingCARBON INC·Filed 2018·Granted Aug 10, 2021·0 cites·24 claims
- 2651US9341761B2Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizesKLA TENCOR CORP·Filed 2014·Granted May 17, 2016·0 cites·18 claims
- 2749US2022266514A1Additive manufacturing apparatus with purged light engineCARBON INC·Filed 2020·Application pending·0 cites
- 2848US2021141313A1Resin cassettesCARBON INC·Filed 2020·Application pending·0 cites
- 2944US2018215093A1Additive manufacturing with high intensity lightCARBON INC·Filed 2018·Application pending·0 cites
- 3042US10257918B2System and method for laser-sustained plasma illuminationKLA TENCOR CORP·Filed 2016·Granted Apr 9, 2019·0 cites·43 claims
- 3139US2021031451A1Temperature regulated stereolithography apparatus with infrared heatingCARBON INC·Filed 2020·Application pending·0 cites
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