Inventor · disambiguated record
Paul Holzapfel
Also filed as: HOLZAPFEL PAUL · HOLZAPFEL PAUL L
15 granted patents·1 pending application·876 citations·filing 1996–2004
95Inventor score
Top patents by PatentIndex Score
16 records- 0196US5872633AMethods and apparatus for detecting removal of thin film layers during planarizationSPEEDFAM CORP·Filed 1997·Granted Feb 16, 1999·390 cites·17 claims
- 0292US6371838B1Polishing pad conditioning device with cutting elementsSPEEDFAM IPEC CORP·Filed 1997·Granted Apr 16, 2002·107 cites·28 claims
- 0388US5733171AApparatus for the in-process detection of workpieces in a CMP environmentSPEEDFAM CORP·Filed 1996·Granted Mar 31, 1998·71 cites·16 claims
- 0486US5961369AMethods for the in-process detection of workpieces with a monochromatic light sourceSPEEDFAM IPEC CORP·Filed 1998·Granted Oct 5, 1999·61 cites·10 claims
- 0578US6960115B2Multiprobe detection system for chemical-mechanical planarization toolSPEEDFAM IPEC CORP·Filed 2003·Granted Nov 1, 2005·19 cites·24 claims
- 0676US7422892B2Enzyme-based device for environmental monitoringAGENTASE LLC·Filed 2004·Granted Sep 9, 2008·8 cites·25 claims
- 0776US6805613B1Multiprobe detection system for chemical-mechanical planarization toolSPEEDFAM IPEC CORP·Filed 2000·Granted Oct 19, 2004·17 cites·29 claims
- 0875US6350184B1Polishing pad conditioning device with cutting elementsSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 26, 2002·13 cites·27 claims
- 0974US5958148AMethod for cleaning workpiece surfaces and monitoring probes during workpiece processingSPEEDFAM IPEC CORP·Filed 1997·Granted Sep 28, 1999·42 cites·11 claims
- 1069US5842912AApparatus for conditioning polishing pads utilizing brazed diamond technologySPEEDFAM CORP·Filed 1996·Granted Dec 1, 1998·38 cites·7 claims
- 1169US5823853AApparatus for the in-process detection of workpieces with a monochromatic light sourceSPEEDFAM CORP·Filed 1997·Granted Oct 20, 1998·36 cites·9 claims
- 1263US6347982B1Method for making a polishing apparatus utilizing brazed diamond technology and titanium nitrideSPEEDFAM IPEC CORP·Filed 1999·Granted Feb 19, 2002·19 cites·11 claims
- 1361US5993289AMethods for the in-process detection of workpieces in a CMP environmentSPEEDFAM IPEC CORP·Filed 1998·Granted Nov 30, 1999·19 cites·16 claims
- 1460US6347981B1Method and apparatus for conditioning polishing pads utilizing brazed diamond technology and titanium nitrideSPEEDFAM IPEC CORP·Filed 1999·Granted Feb 19, 2002·17 cites·8 claims
- 1557US6217410B1Apparatus for cleaning workpiece surfaces and monitoring probes during workpiece processingSPEEDFAM IPEC CORP·Filed 1999·Granted Apr 17, 2001·19 cites·20 claims
- 1630US2001012108A1Methods and apparatus for the in-process measurement of thin film layersFiled 1998·Application pending·0 cites
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