Inventor · disambiguated record
Kazunari Shinya
Also filed as: SHINYA KAZUNARI
7 granted patents·95 citations·filing 1993–2009
86Inventor score
Top patents by PatentIndex Score
7 records- 0192US7438627B2Polishing state monitoring methodEBARA CORP·Filed 2007·Granted Oct 21, 2008·17 cites·6 claims
- 0291US7645181B2Polishing state monitoring apparatus and polishing apparatusEBARA CORP·Filed 2008·Granted Jan 12, 2010·13 cites·13 claims
- 0391US7252575B2Polishing state monitoring apparatus and polishing apparatus and methodSHIMADZU CORP·Filed 2003·Granted Aug 7, 2007·44 cites·18 claims
- 0475US8342907B2Polishing state monitoring methodEBARA CORP·Filed 2009·Granted Jan 1, 2013·3 cites·9 claims
- 0563US7012699B2Method of and apparatus for measuring thickness of thin film or thin layerSHIMADZU CORP·Filed 2003·Granted Mar 14, 2006·9 cites·17 claims
- 0642US7002693B2Thickness measurement method and apparatusSHIMADZU CORP·Filed 2003·Granted Feb 21, 2006·2 cites·10 claims
- 0733US5442574AMethod and apparatus for determining a base line of a measurementSHIMADZU CORP·Filed 1993·Granted Aug 15, 1995·7 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →