Inventor · disambiguated record
Tetsushi Tsukamoto
Also filed as: TSUKAMOTO TETSUSHI
5 granted patents·39 citations·filing 2001–2004
77Inventor score
Files withSHINETSU CHEMICAL CO5
Top patents by PatentIndex Score
5 records- 0178US7264908B2Photo mask blank and photo maskSHINETSU CHEMICAL CO·Filed 2004·Granted Sep 4, 2007·17 cites·7 claims
- 0274US7195846B2Methods of manufacturing photomask blank and photomaskSHINETSU CHEMICAL CO·Filed 2003·Granted Mar 27, 2007·13 cites·13 claims
- 0362US6928837B2Silica glass substrates and their selectionSHINETSU CHEMICAL CO·Filed 2001·Granted Aug 16, 2005·6 cites·12 claims
- 0449US7037625B2Phase shift mask blank and method of manufactureSHINETSU CHEMICAL CO·Filed 2002·Granted May 2, 2006·2 cites·18 claims
- 0545US6727027B2Photomask blank and photomaskSHINETSU CHEMICAL CO·Filed 2001·Granted Apr 27, 2004·1 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →