Inventor · disambiguated record
Shinya Morisawa
Also filed as: MORISAWA SHINYA
11 granted patents·6 pending applications·238 citations·filing 2000–2019
92Inventor score
Top patents by PatentIndex Score
17 records- 0195US10486285B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2017·Granted Nov 26, 2019·9 cites·10 claims
- 0293US9358662B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2014·Granted Jun 7, 2016·9 cites·21 claims
- 0392US8795032B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodMIYAZAKI MITSURU·Filed 2009·Granted Aug 5, 2014·22 cites·14 claims
- 0492US6615854B1Wafer cleaning apparatusEBARA CORP·Filed 2000·Granted Sep 9, 2003·55 cites·25 claims
- 0591US6921466B2Revolution member supporting apparatus and semiconductor substrate processing apparatusEBARA CORP·Filed 2001·Granted Jul 26, 2005·48 cites·3 claims
- 0691US6558478B1Method of and apparatus for cleaning substrateEBARA CORP·Filed 2000·Granted May 6, 2003·65 cites·30 claims
- 0783US7736474B2Plating apparatus and plating methodEBARA CORP·Filed 2005·Granted Jun 15, 2010·8 cites·4 claims
- 0880US11426834B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2019·Granted Aug 30, 2022·1 cites·2 claims
- 0969US7037853B2Wafer cleaning apparatusEBARA CORP·Filed 2003·Granted May 2, 2006·10 cites·13 claims
- 1068US6745784B2Method of and apparatus for cleaning substrateEBARA CORP·Filed 2003·Granted Jun 8, 2004·11 cites·28 claims
- 1161US9687957B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2014·Granted Jun 27, 2017·0 cites·29 claims
- 1257US2009026068A1Revolution member supporting apparatus and semiconductor substrate processing apparatusHONGO AKIHISA·Filed 2008·Application pending·0 cites
- 1354US2007113977A1Revolution member supporting apparatus and semiconductor substrate processing apparatusHONGO AKIHISA·Filed 2007·Application pending·0 cites
- 1448US2005023149A1Plating apparatus, plating method and substrate processing apparatusFiled 2004·Application pending·0 cites
- 1548US2009101181A1Substrate cleaning apparatusEBARA CORP·Filed 2008·Application pending·0 cites
- 1644US2005087441A1Revolution member supporting apparatus and semiconductor substrate processing apparatusFiled 2004·Application pending·0 cites
- 1738US2010219078A1Plating apparatus and plating methodKURASHINA KEIICHI·Filed 2010·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →