Inventor · disambiguated record
Shibu Gangadharan
Also filed as: GANGADHARAN SHIBU
5 granted patents·148 citations·filing 2003–2010
81Inventor score
Top patents by PatentIndex Score
5 records- 0195US7204913B1In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition controlLAM RES CORP·Filed 2003·Granted Apr 17, 2007·92 cites·6 claims
- 0293US7767584B1In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition controlLAM RES CORP·Filed 2007·Granted Aug 3, 2010·45 cites·7 claims
- 0372US8394723B2Aspect ratio adjustment of mask pattern using trimming to alter geometry of photoresist featuresVALDIVIA JUAN·Filed 2010·Granted Mar 12, 2013·7 cites·22 claims
- 0454US7425277B1Method for hard mask CD trimLAM RES CORP·Filed 2003·Granted Sep 16, 2008·4 cites·17 claims
- 0552US7667281B2Method for hard mask CD trimLAM RES CORP·Filed 2007·Granted Feb 23, 2010·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →