Inventor · disambiguated record
Fu-Chang Lo
Also filed as: LO FU-CHANG
7 granted patents·2 pending applications·62 citations·filing 2001–2011
83Inventor score
Top patents by PatentIndex Score
9 records- 0185US6607862B2Damascene extreme ultraviolet lithography alternative phase shift photomask and method of makingINTEL CORP·Filed 2001·Granted Aug 19, 2003·27 cites·56 claims
- 0272US7264853B2Attaching a pellicle frame to a reticleINTEL CORP·Filed 2003·Granted Sep 4, 2007·16 cites·17 claims
- 0365US7314667B2Process to optimize properties of polymer pellicles and resist for lithography applicationsINTEL CORP·Filed 2004·Granted Jan 1, 2008·12 cites·15 claims
- 0462US8012651B2Mounting a pellicle to a frameINTEL CORP·Filed 2007·Granted Sep 6, 2011·2 cites·16 claims
- 0557US7316869B2Mounting a pellicle to a frameINTEL CORP·Filed 2003·Granted Jan 8, 2008·5 cites·23 claims
- 0654US2007037074A1Use of alternative polymer materials for "soft" polymer pelliclesTREGUB ALEXANDER·Filed 2006·Application pending·0 cites
- 0743US8551675B2Mounting a pellicle to a frameESCHBACH FLORENCE·Filed 2011·Granted Oct 8, 2013·0 cites·5 claims
- 0839US2005202252A1Use of alternative polymer materials for "soft" polymer pelliclesFiled 2004·Application pending·0 cites
- 0938US7763395B2Radiation stability of polymer pelliclesINTEL CORP·Filed 2003·Granted Jul 27, 2010·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →