Inventor · disambiguated record
Gregory Brady
Also filed as: BRADY GREGORY · BRADY GREGORY R
15 granted patents·93 citations·filing 2002–2021
91Inventor score
Top patents by PatentIndex Score
15 records- 0198US9518916B1Compressive sensing for metrologyKLA TENCOR CORP·Filed 2014·Granted Dec 13, 2016·38 cites·29 claims
- 0296US9310290B2Multiple angles of incidence semiconductor metrology systems and methodsKLA TENCOR CORP·Filed 2015·Granted Apr 12, 2016·18 cites·35 claims
- 0391US10203247B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2016·Granted Feb 12, 2019·10 cites·21 claims
- 0488US9400246B2Optical metrology tool equipped with modulated illumination sourcesKLA TENCOR CORP·Filed 2012·Granted Jul 26, 2016·5 cites·24 claims
- 0588US9116103B2Multiple angles of incidence semiconductor metrology systems and methodsKLA TENCOR CORP·Filed 2013·Granted Aug 25, 2015·7 cites·34 claims
- 0683US9255877B2Metrology system optimization for parameter trackingKLA TENCOR CORP·Filed 2014·Granted Feb 9, 2016·6 cites·20 claims
- 0775US10976249B1Reflective pupil relay systemKLA TENCOR CORP·Filed 2014·Granted Apr 13, 2021·3 cites·23 claims
- 0873US11913874B2Optical metrology tool equipped with modulated illumination sourcesKLA CORP·Filed 2021·Granted Feb 27, 2024·0 cites·12 claims
- 0971US10062157B2Compressive sensing for metrologyKLA TENCOR CORP·Filed 2016·Granted Aug 28, 2018·1 cites·21 claims
- 1069US10527830B2Off-axis reflective afocal optical relayKLA TENCOR CORP·Filed 2016·Granted Jan 7, 2020·1 cites·29 claims
- 1169US9512985B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2013·Granted Dec 6, 2016·2 cites·50 claims
- 1268US8982358B2Apparatus and method of measuring roughness and other parameters of a structureKLA TENCOR CORP·Filed 2013·Granted Mar 17, 2015·2 cites·34 claims
- 1364US10215688B2Optical metrology tool equipped with modulated illumination sourcesKLA TENCOR CORP·Filed 2016·Granted Feb 26, 2019·0 cites·19 claims
- 1463US10969328B2Optical metrology tool equipped with modulated illumination sourcesKLA TENCOR CORP·Filed 2019·Granted Apr 6, 2021·0 cites·10 claims
- 1537US6788423B2Conic constant measurement methods for refractive microlensesDIGITAL OPTICS CORP·Filed 2002·Granted Sep 7, 2004·0 cites·14 claims
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