Inventor · disambiguated record
Kuo-Shih Liu
Also filed as: LIU KUO-SHIH
6 granted patents·7 pending applications·60 citations·filing 1999–2024
78Inventor score
Files withAPPLIED MATERIALS INC6ASML NETHERLANDS BV3LIU KUO-SHIH2GLORIA SOLAR CO LTD1WISTRON NEWEB CORP1
Top patents by PatentIndex Score
13 records- 0189US6553932B2Reduction of plasma edge effect on plasma enhanced CVD processesAPPLIED MATERIALS INC·Filed 2001·Granted Apr 29, 2003·51 cites·58 claims
- 0279US11175590B2Low dose charged particle metrology systemASML NETHERLANDS BV·Filed 2018·Granted Nov 16, 2021·2 cites·19 claims
- 0370US11720030B2Low dose charged particle metrology systemASML NETHERLANDS BV·Filed 2021·Granted Aug 8, 2023·0 cites·17 claims
- 0458US11430631B2Methods of inspecting samples with multiple beams of charged particlesASML NETHERLANDS BV·Filed 2020·Granted Aug 30, 2022·0 cites·15 claims
- 0555US8582079B2Using phase difference of interference lithography for resolution enhancementLIU KUO-SHIH·Filed 2007·Granted Nov 12, 2013·3 cites·28 claims
- 0655US2025047003A1Antenna structure and electronic deviceWISTRON NEWEB CORP·Filed 2024·Application pending·0 cites
- 0751US2013037076A1Solar panel and electrode structure thereof and manufacturing method thereofGLORIA SOLAR CO LTD·Filed 2012·Application pending·0 cites
- 0846US2009111056A1Resolution enhancement techniques combining four beam interference-assisted lithography with other photolithography techniquesAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 0946US2009117491A1Resolution enhancement techniques combining interference-assisted lithography with other photolithography techniquesAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1044US2009246706A1Patterning resolution enhancement combining interference lithography and self-aligned double patterning techniquesAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1144US2010002210A1Integrated interference-assisted lithographyAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1242US2012247532A1Solar cell panelLIU KUO-SHIH·Filed 2011·Application pending·0 cites
- 1330US6170430B1Gas feedthrough with electrostatic discharge characteristicAPPLIED MATERIALS INC·Filed 1999·Granted Jan 9, 2001·4 cites·10 claims
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