Inventor · disambiguated record
Nobushige Korenaga
Also filed as: KORENAGA NOBUSHIGE
57 granted patents·13 pending applications·1,564 citations·filing 1990–2024
99Inventor score
Top patents by PatentIndex Score
70 records- 0198US6987335B2Alignment apparatus and exposure apparatus using the sameCANON KK·Filed 2003·Granted Jan 17, 2006·70 cites·20 claims
- 0297US7227284B2Alignment apparatus and exposure apparatus using the sameCANON KK·Filed 2006·Granted Jun 5, 2007·32 cites·7 claims
- 0397US7075198B2Alignment apparatus and exposure apparatus using the sameCANON KK·Filed 2005·Granted Jul 11, 2006·32 cites·12 claims
- 0496US5684856AStage device and pattern transfer system using the sameCANON KK·Filed 1994·Granted Nov 4, 1997·133 cites·16 claims
- 0595US6265793B1Linear motor coil for exposure apparatusCANON KK·Filed 1999·Granted Jul 24, 2001·96 cites·33 claims
- 0692US7075197B2Aligning apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted Jul 11, 2006·19 cites·17 claims
- 0792US6172738B1Scanning exposure apparatus and device manufacturing method using the sameCANON KK·Filed 1997·Granted Jan 9, 2001·94 cites·21 claims
- 0892US6107703ALinear motor mechanism for exposure apparatus, and device manufacturing method using the sameCANON KK·Filed 1998·Granted Aug 22, 2000·90 cites·36 claims
- 0990US6903468B2Moving stage device in exposure apparatusCANON KK·Filed 2003·Granted Jun 7, 2005·29 cites·17 claims
- 1090US6665053B2Supporting system in exposure apparatusCANON KK·Filed 2001·Granted Dec 16, 2003·37 cites·16 claims
- 1189US7067942B2Linear motor, moving stage system, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Jun 27, 2006·26 cites·2 claims
- 1289US6414742B1Stage apparatus, and exposure apparatus and device manufacturing method using the sameCANON KK·Filed 1998·Granted Jul 2, 2002·70 cites·32 claims
- 1388US7307692B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Dec 11, 2007·12 cites·8 claims
- 1488US6791214B2Moving-magnet linear motor, aligner and apparatus provided therewith, and method for manufacturing devices using the sameCANON KK·Filed 2002·Granted Sep 14, 2004·28 cites·18 claims
- 1588US6002465AStage device, exposure apparatus using the same, and device production methodCANON KK·Filed 1997·Granted Dec 14, 1999·67 cites·20 claims
- 1687US8562323B2Imprint apparatus and method for producing articleITO HIROHITO·Filed 2010·Granted Oct 22, 2013·7 cites·18 claims
- 1786US6954041B2Supporting apparatus having a plurality of magnets that generate a floating force and method, stage apparatus, and exposure apparatusCANON KK·Filed 2003·Granted Oct 11, 2005·21 cites·28 claims
- 1886US6873404B2Stage apparatus and method of driving the sameCANON KK·Filed 2002·Granted Mar 29, 2005·25 cites·14 claims
- 1986US6864602B2Linear motor, stage apparatus, and exposure apparatusCANON KK·Filed 2002·Granted Mar 8, 2005·33 cites·48 claims
- 2085US9977347B2Positioning apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2017·Granted May 22, 2018·3 cites·13 claims
- 2185US7280185B2Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing deviceCANON KK·Filed 2006·Granted Oct 9, 2007·6 cites·5 claims
- 2285US5467720ASupport deviceCANON KK·Filed 1994·Granted Nov 21, 1995·88 cites·14 claims
- 2383US6570645B2Stage system and stage driving method for use in exposure apparatusCANON KK·Filed 1999·Granted May 27, 2003·58 cites·86 claims
- 2483US6359677B2Stage apparatus, exposure apparatus using the same, and a device manufacturing methodCANON KK·Filed 1998·Granted Mar 19, 2002·49 cites·33 claims
- 2583US5537186AMovable stage mechanism and exposure apparatus using the sameCANON KK·Filed 1994·Granted Jul 16, 1996·32 cites·12 claims
- 2682US6037680AStage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatusCANON KK·Filed 1998·Granted Mar 14, 2000·55 cites·8 claims
- 2781US6952254B2Supporting system in exposure apparatusCANON KK·Filed 2003·Granted Oct 4, 2005·18 cites·21 claims
- 2880US7508099B2Driving apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2007·Granted Mar 24, 2009·9 cites·12 claims
- 2980US6177978B1Stage device and exposure apparatus using the sameCANON KK·Filed 1997·Granted Jan 23, 2001·49 cites·158 claims
- 3079US6917046B2Positioning apparatus, charged-particle-beam exposure apparatus, and device manufacturing methodCANON KK·Filed 2003·Granted Jul 12, 2005·13 cites·13 claims
- 3178US6128069AStage mechanism for exposure apparatusCANON KK·Filed 1998·Granted Oct 3, 2000·39 cites·23 claims
- 3276US7030964B2Stage system, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Apr 18, 2006·17 cites·15 claims
- 3376US6479991B1Stage mechanism, exposure apparatus and device manufacturing method in which a coil unit of a driving mechanism is moved substantially in synchronism with a stageCANON KK·Filed 1999·Granted Nov 12, 2002·35 cites·26 claims
- 3474US6859257B2Stage systemCANON KK·Filed 2003·Granted Feb 22, 2005·12 cites·45 claims
- 3573US6320645B1Stage system and exposure apparatus, and device manufacturing method using the sameCANON KK·Filed 1999·Granted Nov 20, 2001·30 cites·13 claims
- 3672US9310688B2Processing apparatus and article manufacturing method using sameCANON KK·Filed 2013·Granted Apr 12, 2016·2 cites·17 claims
- 3771US6426788B1Stage device and exposure apparatus using the sameCANON KK·Filed 2000·Granted Jul 30, 2002·11 cites·106 claims
- 3870US9373532B2Guide apparatus, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2013·Granted Jun 21, 2016·2 cites·15 claims
- 3970US6157159AStage system and exposure apparatus using the sameCANON KK·Filed 1999·Granted Dec 5, 2000·28 cites·18 claims
- 4069US9547242B2Lithography apparatus, and method of manufacturing articleCANON KK·Filed 2015·Granted Jan 17, 2017·1 cites·7 claims
- 4169US5681638ASubstrate, and method and apparatus for holding the substrateCANON KK·Filed 1995·Granted Oct 28, 1997·35 cites·15 claims
- 4268US8810770B2Exposure apparatus and article manufacturing methodMAEHARA YUJI·Filed 2011·Granted Aug 19, 2014·4 cites·23 claims
- 4368US7383929B2Anti-vibration techniqueCANON KK·Filed 2004·Granted Jun 10, 2008·13 cites·12 claims
- 4468US7348695B2Linear motor, moving stage system, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted Mar 25, 2008·1 cites·13 claims
- 4563US7057710B2Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing deviceCANON KK·Filed 2004·Granted Jun 6, 2006·5 cites·32 claims
- 4663US6946757B2Stage apparatus and method of controlling the sameCANON KK·Filed 2003·Granted Sep 20, 2005·10 cites·11 claims
- 4759US2024290650A1Stage apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 4858US8834769B2Imprint apparatus for forming a pattern of a resin on a substrate using a moldKORENAGA NOBUSHIGE·Filed 2010·Granted Sep 16, 2014·1 cites·6 claims
- 4958US2024393704A1Structure, exposure apparatus, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 5056US7282819B2Stage apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Oct 16, 2007·7 cites·7 claims
Showing the top 50 of 70 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →